Abstract：Adding Si-containing precursors to the discharge gas can introduce Si-containing groups on the surface of the materials and effectively improve the surface hydrophobicity by plasma treatment, which is important for the improvement of the surface insulating performance of insulators. In this paper, hexamethyldisiloxane (HMDSO) was selected as the Si-containing precursors, and ns pulse excitation was used to generate jet discharges in Ar/HMDSO. The influences of HMDSO ratio on the discharge characteristics were studied by diagnosing the electrical characteristics (voltage and current measurements, etc.) and optical characteristics (discharge images, emission spectra and ICCD measurements). The variations of plasma plume length, discharge power, transported charge, spectral line intensity of main particles and ionization wave propagation with HMDSO ratio were obtained and further analyzed in combination with the discharge ionization reaction and dynamic development process. The results show that the introduction of a small amount of HMDSO promotes the discharge by the increasing of the length of the jet plume, injection power, transported charge, intensity of the main particle line, ionization wave propagation speed and distance. Those parameters reach the maximum values at 0.04% HMDSO. When the HMDSO content is greater than 0.04%, the discharge is weakened and the corresponding parameters decrease with the increase of the HMDSO ratio. The competition of the direct ionization reaction of HMDSO and the reaction of HMDSO with Ar excited states are the reason for the maximum values of the parameters existing in the studied range of HMDSO addition.
李劲卓, 刘峰, 方志. HMDSO含量对纳秒脉冲激励Ar/HMDSO射流放电特性的影响[J]. 电工技术学报, 2021, 36(13): 2675-2683.
Li Jinzhuo, Liu Feng, Fang Zhi. Effect of HMDSO Ratio on Discharge Characteristics of Ar/HMDSO Jets Excited by Nanosecond Pulse. Transactions of China Electrotechnical Society, 2021, 36(13): 2675-2683.
[1] 戴栋, 宁文军, 邵涛. 大气压低温等离子体的研究现状与发展趋势[J]. 电工技术学报, 2017, 32(20): 1-9. Dai Dong, Ning Wenjun, Shao Tao.A review on the state of art andd future trends of atmospheric pressure low temperature plasmas[J]. Transactions of China Electrotechnical Society, 2017, 32(20): 1-9. [2] 邵涛, 章程, 王瑞雪, 等. 大气压脉冲气体放电与等离子体应用[J]. 高电压技术, 2016, 42(3): 685-705. Shao Tao, Zhang Cheng, Wang Ruixue, et al.Atmospheric-pressure pulsed gas discharge and pulsed plasma application[J]. High Voltage Engineering, 2016, 42(3): 685-705. [3] 吴淑群, 聂兰兰, 卢新培. 大气压非平衡等离子体射流[J]. 高电压技术, 2015, 41(8): 2602-2624. Wu Shuqun, Nie Lanlan, Lu Xinpei.Atmospheric-pressure non-equilibrium plasma jets[J]. High Voltage Engineering, 2015, 41(8): 2602-2624. [4] 詹振宇, 阮浩鸥, 律方成, 等. 等离子体氟化改性环氧树脂及其在C4F7N/CO2混合气体中电气性能研究[J]. 电工技术学报, 2020, 35(8): 1787-1798. Zhan Zhenyu, Ruan Haoou, Lü Fangcheng, et al.Plasma fluorinated epoxy resin and its insulation properties in C4F7N/CO2 mixed gas[J]. Transactions of China Electrotechnical Society, 2020, 35(8): 1787-1798. [5] 马翊洋, 章程, 孔飞, 等. 等离子体射流阵列辅助薄膜沉积对环氧树脂表面电气特性的影响[J]. 高电压技术, 2018, 44(9): 3089-3096. Ma Yiyang, Zhang Cheng, Kong Fei, et al.Effect of plasma jet array assisted film deposition on epoxy resin surface electrical characteristics[J]. High Voltage Engineering, 2018, 44(9): 3089-3096. [6] 林浩凡, 王瑞雪, 谢庆, 等. 等离子体射流快速改性促进表面电荷衰减[J]. 电工技术学报, 2017, 32(16): 256-264. Lin Haofan, Wang Ruixue, Xie Qing, et al.Rapid surface modification by plasma jet to promote surface charge decaying[J]. Transactions of China Electrote-chnical Society, 2017, 32(16): 256-264. [7] Xian Yubin, Hasnain Q M, Yue Yuanfu, et al.Discharge effects on gas flow dynamics in a plasma jet[J]. Physics of Plasmas, 2016, 23(10): 103509. [8] Fanelli F, Fracassi F.Atmospheric pressure non-equilibrium plasma jet technology: general features, specificities and applications in surface processing of materials[J]. Surface and Coatings Technology, 2017, 322: 174-201. [9] Wang Ruixue, Shen Yuan, Zhang Cheng, et al.Comparison between helium and argon plasma jets on improving the hydrophilic property of PMMA surface[J]. Applied Surface Science, 2016, 367: 401-406. [10] Fang Zhi, Yang Jingru, Liu Yuan, et al.Surface treatment of polyethylene terephthalate to improving hydrophilicity using atmospheric pressure plasma jet[J]. IEEE Transactions on Plasma Science, 2013, 41(6): 1627-1634. [11] 张迅, 曾华荣, 田承越, 等. 大气压等离子体制备超疏水表面及其防冰抑霜研究[J]. 电工技术学报, 2019, 34(24): 5289-5296. Zhang Xun, Zeng Huarong, Tian Chengyue, et al.Super-hydrophobic surface prepared by atmospheric-pressure plasma and its anti-icing, anti-frosting performance[J]. Transactions of China Electrotechnical Society, 2019, 34(24): 5289-5296. [12] 王珏, 徐蓉, 严萍. 环氧复合绝缘材料表面处理方法对高气压下闪络特性的影响[J]. 电工技术学报, 2018, 33(20): 4704-4711. Wang Jue, Xu Rong, Yan Ping.Effect of surface treatment methods of epoxy composite insulation on flashover characteristics under high pressure[J]. Transactions of China Electrotechnical Society, 2018, 33(20): 4704-4711. [13] Xie Qing, Lin Haofan, Zhang Shuai, et al.Deposition of SiCxHyOz thin film on epoxy resin by nanosecond pulsed APPJ for improving the surface insulating performance[J]. Plasma Science and Technology, 2018, 20(2): 160-169. [14] Liu Feng, Cai Meiling, Zhang Bo, et al.Hydrophobic surface modification of polymethyl methacrylate by two-dimensional plasma jet array at atmospheric pressure[J]. Journal of Vacuum Science and Technology A, 2018, 36(6): 061302. [15] Wang Ruixue, Zhang Cheng, Liu Xiong, et al.Microsecond pulse driven Ar/CF4 plasma jet for polymethylmethacrylate surface modification at atmospheric pressure[J]. Applied Surface Science, 2015, 328: 509-515. [16] Vogelsang A, Ohl A, Foest R, et al.Fluorocarbon plasma polymer deposition by an atmospheric pressure microplasma jet using different precursor molecules-a comparative study[J]. Plasma Processes and Polymers, 2013, 10(4): 364-371. [17] Kwong C H, Ng S P, Kan C W, et al.Inducing hydrophobic surface on polyurethane synthetic leather by atmospheric pressure plasma[J]. Fibers and Polymers, 2014, 15(8): 1596-1600. [18] Kakiuchi H, Higashida K, Shibata T, et al.High-rate HMDSO-based coatings in open air using atmospheric-pressure plasma jet[J]. Journal of Non-Crystalline Solids, 2012, 358(17): 2462-2465. [19] Fang Zhi, Ding Zhengfang, Shao Tao, et al.Hydrophobic surface modification of epoxy resin using an atmospheric pressure plasma jet array[J]. IEEE Transactions on Dielectrics and Electrical Insulation, 2016, 23(4): 2288-2293. [20] Xiong Qing, Zhu Lingyu, Ji Shengchang, et al.Flashover performance of silicon rubber under combined AC-DC voltage and its improving method[J]. IEEE Transactions on Dielectrics and Electrical Insulation, 2018, 25(1): 272-280. [21] Chen Sile, Wang Shuai, Wang Yibo, et al.Surface modification of epoxy resin using He/CF4 atmospheric pressure plasma jet for flashover withstanding characteristics improvement in vacuum[J]. Applied Surface Science, 2017, 414: 107-113. [22] 海彬, 章程, 王瑞雪, 等. 等离子体沉积类SiO2薄膜抑制环氧树脂表面电荷积聚[J]. 高电压技术, 2017, 43(2): 45-54. Hai Bin, Zhang Cheng, Wang Ruixue, et al.Plasma depositing SiO2-like film to suppress surface charge accumulation on epoxy resin[J]. High Voltage Engineering, 2017, 43(2): 45-54. [23] Wu Shuqun, Liu Xueyuan, Huang Guowang, et al.Influence of high-voltage pulse parameters on the propagation of a plasma synthetic jet[J]. Plasma Science and Technology, 2019, 21(7): 60-68. [24] Zhang Cheng, Shao Tao, Zhou Yixiao, et al.Effect of O2 additive on spatial uniformity of atmospheric-pressure helium plasma jet array driven by microsecond-duration pulses[J]. Applied Physics Letters, 2014, 105(4): 044102. [25] Boselli M, Colombo V, Ghedini E, et al.Schlieren high-speed imaging of a nanosecond pulsed atmospheric pressure non-equilibrium plasma jet[J]. Plasma Chemistry and Plasma Processing, 2014, 34(4): 853-869. [26] Bastos D C, Santos A E F, Fonseca M, et al. Inducing surface hydrophobization on cornstarch film by SF6 and HMDSO plasma treatment[J]. Carbohydrate Polymers, 2013, 91(2): 675-681. [27] Huang Chun, Liu Chihung, Su Chun Hsien, et al.Investigation of atmospheric-pressure plasma deposited SiOx films on polymeric substrates[J]. Thin Solid Films, 2009, 517(17): 5141-5145. [28] 律方成, 詹振宇, 张立国, 等. 等离子体氟化改性微米AlN填料对环氧树脂绝缘性能的影响[J]. 电工技术学报, 2019, 34(16): 3522-3531. Lü Fangcheng, Zhan Zhenyu, Zhang Liguo, et al.Effect of plasma fluorinated modified micro-AlN filler epoxy resin on the insulation properties[J]. Transactions of China Electrotechnical Society, 2019, 34(16): 3522-3531. [29] Ruegner K, Reuter R, Ellerweg D, et al.Insight into the reaction scheme of SiO2 film deposition at atmospheric pressure[J]. Plasma Processes & Polymers, 2013, 10(12): 1061-1073. [30] 张波, 周若瑜, 汪立峰, 等. 脉冲参数对大气压He中一维射流阵列放电特性的影响[J]. 电工技术学报, 2018, 33(21): 5109-5118. Zhang Bo, Zhou Ruoyu, Wang Lifeng, et al.Influence of pulse parameters on discharge characteristics of one-dimensional plasma jet array in He at atmospheric pressure[J]. Transactions of China Electrotechnical Society, 2018, 33(21): 5109-5118. [31] Teschke M, Kedzierski J, Finantu-Dinu E G, et al. High-speed photographs of a dielectric barrier atmospheric pressure plasma jet[J]. IEEE Transactions on Plasma Science, 2005, 33(2): 310-311. [32] Loffhagen D, Becker M M, Hegemann D, et al.Large-area atmospheric pressure dielectric barrier discharges in Ar-HMDSO mixtures: experiments and fluid modelling[J]. Plasma Processes and Polymers, 2020, 17(2): e1900169. [33] 方志, 张波, 周若瑜, 等. HMDSO添加对大气压Ar等离子体射流阵列放电特性的影响[J]. 高电压技术, 2017, 43(6): 1775-1783. Fang Zhi, Zhang Bo, Zhou Ruoyu, et al.Effect of HMDSO addition on discharge characteristics of atmospheric pressure plasma jet array in argon[J]. High Voltage Engineering, 2017, 43(6): 1775-1783. [34] 张波, 汪立峰, 刘峰, 等. 交流和纳秒脉冲激励氦气中等离子体射流阵列放电特性比较[J]. 电工技术学报, 2019, 34(6): 1319-1328. Zhang Bo, Wang Lifeng, Liu Feng, et al.Comparison on discharge characteristics of the helium plasma jet array excited by alternating current and nanosecond pulse voltage[J]. Transactions of China Electrotechnical Society, 2019, 34(6): 1319-1328. [35] 赵勇, 王瑞雪, 章程, 等. 脉冲波形对氦等离子体射流子弹传播特性的影响[J]. 电工技术学报, 2019, 34(16): 3472-3479. Zhao Yong, Wang Ruixue, Zhang Cheng, et al.The effect of pulse parameters on helium plasma bullet distribution properties[J]. Transactions of China Electrotechnical Society, 2019, 34(16): 3472-3479. [36] Shao Tao, Yang Wenjin, Zhang Cheng, et al.Temporal evolution of atmosphere pressure plasma jets driven by microsecond pulses with positive and negative polarities[J]. Europhysics Letters, 2014, 107(6): 65004.
2021, Vol. 36 
