电工技术学报  2017, Vol. 32 Issue (2): 43-52    DOI:
放电等离子体及应用专题Ⅱ |
纳秒脉冲触发的阵列微空心阴极放电特性
张成博, 刘克富, 邱剑
复旦大学电光源研究所 上海 200433
The Discharge Characteristics of Array Micro-Hollow Cathode Triggered by Nanosecond Pulses
Zhang Chengbo, Liu Kefu, Qiu Jian
Institute for Electric Light Sources Fudan University Shanghai 200433 China
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摘要 阵列微空心阴极(MHC)是一种在同一个阴极结构上加工多个微孔形成微孔阵列,实现大面积高电子密度的放电微等离子体结构。相比直流触发模式,纳秒短脉冲触发阵列微空心阴极,可以显著地减少直流触发时的电流热负荷效应,提高放电电流和放电能量。本文利用自行研制的纳秒脉冲电源,实现对阵列微空心阴极在氩气下进行脉冲放电,研究其脉冲条件下的放电特性;其次,研究其在纳秒脉冲下多孔阵列的同步放电问题,并通过加入预触发结构,有效改善其同步特性;最后,利用光纤式发射光谱仪进行氩气下氩发射光谱测量,并对纳秒放电等离子体进行光谱诊断。
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张成博
刘克富
邱剑
关键词 阵列微空心阴极纳秒脉冲同步放电预触发    
Abstract:Array micro-hollow cathode (MHC), composed of multi-hollow with one cathode, is a kind of micro-plasma generator to obtain large-scale, high electron density volume of discharge plasma. Compared with DC operation mode, pulse operation mode for MHC device with ultra-short pulse duration can significantly reduce the impacts of thermal load, thus can increase the current and energy of discharge. In this paper, a pulse discharge for array MHC in Ar is achieved firstly, and its pulsed discharge characteristics are studied using the nanosecond pulse generator designed by our group. Then, its parallel operation is investigated under pulse mode, and its parallel behavior is improved by introducing a pre-trigger concept. At last, an emission spectrum measurement experiment is conducted using optical-fiber emission spectrograph, and the spectrum diagnosis for MHC discharge plasma is carried out to achieve useful plasma parameters.
Key wordsArray    micro-hollow    cathode    (MHC)    nanosecond    pulse    parallel    operation    pre-trigger   
收稿日期: 2016-05-29      出版日期: 2017-02-08
PACS: O539  
基金资助:国家自然科学基金(51277033),国家自然科学基金青年基金(51407033)资助项目
作者简介: 张成博 男,1989年生,博士研究生,研究方向为气体放电等离子体及其应用。E-mail: idaniel1989@163.com;刘克富 男,1963年生,教授,博士生导师,研究方向为脉冲功率和低温等离子体以及应用。E-mail: kfliu@fudan.edu.cn(通信作者)
引用本文:   
张成博, 刘克富, 邱剑. 纳秒脉冲触发的阵列微空心阴极放电特性[J]. 电工技术学报, 2017, 32(2): 43-52. Zhang Chengbo, Liu Kefu, Qiu Jian. The Discharge Characteristics of Array Micro-Hollow Cathode Triggered by Nanosecond Pulses. Transactions of China Electrotechnical Society, 2017, 32(2): 43-52.
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