Abstract：Array micro-hollow cathode (MHC), composed of multi-hollow with one cathode, is a kind of micro-plasma generator to obtain large-scale, high electron density volume of discharge plasma. Compared with DC operation mode, pulse operation mode for MHC device with ultra-short pulse duration can significantly reduce the impacts of thermal load, thus can increase the current and energy of discharge. In this paper, a pulse discharge for array MHC in Ar is achieved firstly, and its pulsed discharge characteristics are studied using the nanosecond pulse generator designed by our group. Then, its parallel operation is investigated under pulse mode, and its parallel behavior is improved by introducing a pre-trigger concept. At last, an emission spectrum measurement experiment is conducted using optical-fiber emission spectrograph, and the spectrum diagnosis for MHC discharge plasma is carried out to achieve useful plasma parameters.
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2017, Vol. 32 
