Abstract：Electrostatic motor has the merits of no magnets, no coils, simple structure and high efficiency, which has potential application prospects in microelectromechanical systems (MEMS). However, there is no theoretical model for the linear electrostatic motor based on variable capacitance. Taking a double-excited linear electrostatic motor as an example, the distribution of electric field inside the motor was obtained by solving the Poisson equation and Laplace equation in the case of multi-layer media. Then, the thrust characteristics of the motor were obtained through the virtual displacement method, thereby establishing a complete mathematical model of the motor and calculating the thrust curve and the maximum field strength of the electric motor. The thrust curve can be used to guide the design of the motor commutation system. Then, a two-dimensional finite element model of the motor was established, and the simulation results have verified the correctness of the mathematical model. Finally, according to the relationship between each parameter of the motor and the maximum thrust, combined with the Sobol sensitivity analysis, the motor was optimized. The results show that the input voltage, the permittivity and the distance between the stator and the slider have the greatest influence on the motor thrust, while the electrode width has the least influence. Accordingly, the design of such motors can be guided.
李华峰, 王伊凡. 静电电机理论研究与性能仿真分析[J]. 电工技术学报, 2021, 36(6): 1201-1209.
Li Huafeng, Wang Yifan. Theoretical Research and Performance Simulation of Electrostatic Motor. Transactions of China Electrotechnical Society, 2021, 36(6): 1201-1209.
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2021, Vol. 36 
