电工技术学报  2016, Vol. 31 Issue (24): 16-24    DOI:
放电等离子体及应用专题 |
低温等离子体处理SF6废气综述
张晓星1, 2, 肖焓艳1, 黄杨珏 3
1. 输变电装备及系统安全与新技术国家重点实验室(重庆大学) 重庆 400044;
2. 武汉大学电气工程学院 武汉 430074;
3. 广东电网有限责任公司电力科学研究院 广州 510030
A Review of Degradation of SF6 Waste by Low Temperature Plasma
Zhang Xiaoxing1, 2, Xiao Hanyan1, Huang Yangjue3
1. State Key Laboratory of Power Transmission Equipment & System Security and New Technology Chongqing University Chongqing 400044 China;;
2. School of Electrical Engineering Wuhan University Wuhan 430074 China;
3. Electric Power Science Research Institute Guangdong Power Grid Corporation Guangzhou 510030 China
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摘要 低温等离子体废气处理技术正越来越引起人们的重视,它是未来环保产业的重要发展方向。由于强温室气体SF6本身的理化特性,等离子体处理SF6面临着更多的挑战,目前该方面的研究综述鲜见。本文尝试根据国内外已有的文献资料, 阐述了等离子体处理SF6的反应机理和其三个评价指标,从射频、微波和介质阻挡放电三种主要的处理SF6的等离子体出发论述了降解过程各个因素对降解率、能量效率以及最终降解产物的影响。同时,提出了等离子体处理SF6需要进一步解决的问题和今后的研究方向,并对其工业化进行了可行性分析。
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关键词 低温等离子体SF6降解率无害化    
Abstract:The low temperature plasma technology for waste gas treatment attracts more and more attention. It becomes an important tendency in future’s environmental protection industry. Due to the physical and chemical properties, the treatment of the strong greenhouse gas SF6 by plasma is faced with more challenges. However, the related researches have rarely been reviewed so far. This paper describes the reaction mechanism as well as three evaluation indexes of plasma treatment of SF6. According to three main plasma treatment methods including radio frequency, microwave and dielectric barrier discharge, the influences of various factors on the destruction and removal efficiency, energy yield and the final byproducts were then comprehensively overviewed. Moreover, the further issues and the future research directions were also presented. Finally, the feasibility of its industrialization was analyzed.
Key wordsLow    temperature    plasma,    SF6,    destruction    and    removal    efficiency,    harmlessness   
收稿日期: 2016-05-29      出版日期: 2017-01-03
PACS: O539  
作者简介: 张晓星 男,1972年生,教授,博士生导师,研究方向为电气设备的在线检测、等离子体放电的应用。E-mail: xiaoxing.zhang@outlook.com(通信作者);肖焓艳 女,1992年生,博士研究生,研究方向为等离子体放电的应用。E-mail: xhy533@hotmail.com
引用本文:   
张晓星, 肖焓艳,黄杨珏. 低温等离子体处理SF6废气综述[J]. 电工技术学报, 2016, 31(24): 16-24. Zhang Xiaoxing,Xiao Hanyan,Huang Yangjue. A Review of Degradation of SF6 Waste by Low Temperature Plasma. Transactions of China Electrotechnical Society, 2016, 31(24): 16-24.
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