Pressure Sensor Based on Direct Current Discharge Plasma
Li Fan1,2,3, Luo Haiyun4, Du Juan1,2,3,5, Nie Chaoqun2,3,5
1. Innovation Academy for Light-duty Gas Turbine CAS Beijing 100190 China; 2. Key Laboratory of Advanced Energy and Power Institute of Engineering Thermophysics (IET) Chinese Academy of Sciences (CAS) Beijing 100190 China; 3. Advanced Gas Turbine Laboratory IET CAS Beijing 100190 China; 4. Gas Discharge and Plasma Laboratory Department of Electrical Engineering; Tsinghua University Beijing 100084 China; 5. University of Chinese Academy of Sciences Beijing 100190 China
Abstract：A type of pressure measuring method based on direct current glow discharge plasma was investigated and a plasma pressure sensor was designed in this paper. The static and dynamic calibrations between the discharge maintaining voltage and air pressure were experimentally tested and analyzed. The static calibration results showed that a spacing of 50μm is suitable for the pressure range from 0.4 to 2.0 atm. A spacing of 220μm is appropriate for the pressure range from 0.5 to 5.0 atm when the currents are selected between 3.0~5.0mA. Additionally, the dynamic calibration experiment was carried out on the shock tube. The results showed that the rise time of the plasma pressure sensor is 1μs, which is the same as the Endevco piezo-resistance transducer. By calculating the dynamic transfer function, the natural frequency of the plasma pressure sensor including its power supply and electronic circuit system is 146.6kHz, which has great potential for acquiring high-frequency flow information in the harsh high temperature and ultra-high-speed flow environment of the aircraft and ramjet engines.
李帆, 罗海云, 杜娟, 聂超群. 基于直流辉光放电等离子体的气体压力传感器[J]. 电工技术学报, 2021, 36(15): 3163-3171.
Li Fan, Luo Haiyun, Du Juan, Nie Chaoqun. Pressure Sensor Based on Direct Current Discharge Plasma. Transactions of China Electrotechnical Society, 2021, 36(15): 3163-3171.
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2021, Vol. 36 
