Experimental Study on the Influence of Inductively Coupled Plasma Operating Parameters on Coating Quality
Zhan Zhihua1,2, Wang Chunhua1, Zhou Qiujiao3, Liu Chengzhou2, Zhao Peng2
1. Faculty of Physics Hefei University of Technology Hefei 230601 China; 2. Institute of Plasma Physics Hefei Institutes of Physical Science Chinese Academy of Sciences Hefei 230031 China; 3. Shenzhen Institute of Advanced Technology Chinese Academy of Sciences Shenzhen 440305 China
Abstract：Inductively coupled plasma (ICP) has obvious technical advantages in the preparation of high purity ceramic coatings because of the absence of electrode ablation pollution and the purity of plasma environment. In this paper, the experimental study on the preparation of boron carbide coating was carried out with the self-developed inductively coupled plasma spraying equipment. The emission spectrometer and high speed camera were used to diagnose the plasma characteristics after adding hydrogen into the discharge gas. The effects of plasma working parameters on the quality of the coating were studied by adding hydrogen in different proportions into the plasma discharge gas. The microstructure, phase and composition of the coating were analyzed by scanning electron microscopy (SEM), X-ray diffraction (XRD) and X-ray fluorescence (XRF).The results show that the addition of hydrogen in the discharge gas can increase the macroscopic gas temperature of plasma, and thus increase the surface melting rate of the sprayed powder. When 0.7L/min hydrogen was added into the discharge gas, the bonding strength of the coating was the highest, and the crystal structure of boron carbide was not changed during the plasma preparation process. Through comparative study, the optimum preparation parameters were obtained, which provided an important experimental basis for exploring process parameters of the independently developed technology.
詹志华, 王春华, 周秋娇, 刘成周, 赵鹏. 感应耦合等离子体喷涂工作参数对涂层性能影响的实验研究[J]. 电工技术学报, 2022, 37(11): 2725-2732.
Zhan Zhihua, Wang Chunhua, Zhou Qiujiao, Liu Chengzhou, Zhao Peng. Experimental Study on the Influence of Inductively Coupled Plasma Operating Parameters on Coating Quality. Transactions of China Electrotechnical Society, 2022, 37(11): 2725-2732.
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