Study on Spatial Distribution of Inductive Coupled Plasma Closed Plasma with Discharge Parameter Variation
Lin Mao1,2, Xu Haojun1, Wei Xiaolong1, Han Xinmin1, Wu Songyao1
1. Science and Technology on Plasma Dynamics Laboratory Air Force Engineering University Xi’an 710038 China; 2. Troop No.93802 of PLA Xi’an 712200 China
Abstract：In the application of inductive coupled plasma(ICP), such as the coil configuration, power supply parameters, pressure and other external conditions are different, it is difficult to get the mechanism of multiple influences on the ICP parameter distribution, This paper combine the simulation and experiment methods, by the establishment of the inductive coil electromagnetic finite element model, analyzing the radio frequency electromagnetic field under different coil configuration in the spatial distribution within the plasma, then we study the influence of discharge parameters (coil configuration, power rate) on the plasma distribution and E-H model dynamic process. By analyzing its discharge parameters to provides a theoretical basis for the miniaturization engineering application of plasma source.The results of experiment and simulation show that: ①Under different coil turns and different power rates, the variation of electromagnetic field intensity has a great influence on the plasma power absorption and power coupling. ②When pressure the working gas Ar is between 0-20Pa, the electron density of ICP is axismetrically distributed, with the increase of the discharge power and gas pressure, the absorbed power and ionization degree of the plasma also increased. The distribution of electron density in the axial and radial directions increases gradually and then decreases rapidly near the wall of the chamber.
林茂, 徐浩军, 魏小龙, 韩欣珉, 武颂尧. 放电参数变化对电感耦合等离子闭式等离子体空间分布特性研究[J]. 电工技术学报, 2022, 37(5): 1294-1304.
Lin Mao, Xu Haojun, Wei Xiaolong, Han Xinmin, Wu Songyao. Study on Spatial Distribution of Inductive Coupled Plasma Closed Plasma with Discharge Parameter Variation. Transactions of China Electrotechnical Society, 2022, 37(5): 1294-1304.
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2022, Vol. 37 
