放电参数变化对电感耦合等离子闭式等离子体空间分布特性研究

doi:10.19595/j.cnki.1000-6753.tces.210022

摘要
图/表
参考文献
相关文章 (15)

全文: PDF (7369 KB) HTML
输出: BibTeX | EndNote (RIS)

摘要射频电感耦合等离子体（ICP）在实际放电过程中,线圈的构型、电源参数、气压等外部工质条件的变化均会对结果产生较大影响,依靠实验很难得到多外部条件对ICP参数分布的影响机理和规律,因此需要结合仿真和实验的方法进行分析。该文通过建立感性线圈的电磁学有限元模型,分析不同线圈构型下射频电磁场在等离子体内部的空间分布,研究放电参数（线圈构型、功率大小）对等离子体分布影响和E-H模型下放电形态的跳变过程,并观察进入稳定H模式后电源参数的变化规律,为等离子体源的小型化工程应用提供理论基础。实验和仿真计算结果表明：不同线圈匝数在不同功率条件下,电磁场强度变化对等离子功率吸收和功率耦合有较大影响;当工作气压在0~20Pa时,ICP的电子密度呈轴对称分布,随着放电功率、气压的增大,等离子体吸收的功率和电离度也随之增加,其电子密度相应地增大,放电功率的增加会使得环状的等离子体区域随之扩大,在轴向、径向上的分布呈先逐渐增大而后在靠近腔室壁面区域迅速下降。

	服务

	把本文推荐给朋友
	加入我的书架
	加入引用管理器
	E-mail Alert
	RSS
	作者相关文章
	林茂
	徐浩军
	魏小龙
	韩欣珉
	武颂尧

关键词 ：电感耦合等离子体, 射频功率, 放电线圈, 参数空间分布

Abstract：In the application of inductive coupled plasma(ICP), such as the coil configuration, power supply parameters, pressure and other external conditions are different, it is difficult to get the mechanism of multiple influences on the ICP parameter distribution, This paper combine the simulation and experiment methods, by the establishment of the inductive coil electromagnetic finite element model, analyzing the radio frequency electromagnetic field under different coil configuration in the spatial distribution within the plasma, then we study the influence of discharge parameters (coil configuration, power rate) on the plasma distribution and E-H model dynamic process. By analyzing its discharge parameters to provides a theoretical basis for the miniaturization engineering application of plasma source.The results of experiment and simulation show that: ①Under different coil turns and different power rates, the variation of electromagnetic field intensity has a great influence on the plasma power absorption and power coupling. ②When pressure the working gas Ar is between 0-20Pa, the electron density of ICP is axismetrically distributed, with the increase of the discharge power and gas pressure, the absorbed power and ionization degree of the plasma also increased. The distribution of electron density in the axial and radial directions increases gradually and then decreases rapidly near the wall of the chamber.

Key words： Inductively coupled plasma radio frequency power discharge coil parameter spatial distribution

收稿日期: 2021-01-10

PACS:

TM31

基金资助:国家自然科学基金资助项目（12075319）

通讯作者: 林茂男,1988年生,博士,研究方向为低气压等离子体放电。E-mail：496180444@qq.com

作者简介: 徐浩军男,1965年生,教授,博士生导师,研究方向为等离子体应用技术。E-mail：262432206@qq.com

引用本文:

林茂, 徐浩军, 魏小龙, 韩欣珉, 武颂尧. 放电参数变化对电感耦合等离子闭式等离子体空间分布特性研究[J]. 电工技术学报, 2022, 37(5): 1294-1304. Lin Mao, Xu Haojun, Wei Xiaolong, Han Xinmin, Wu Songyao. Study on Spatial Distribution of Inductive Coupled Plasma Closed Plasma with Discharge Parameter Variation. Transactions of China Electrotechnical Society, 2022, 37(5): 1294-1304.

链接本文:

https://dgjsxb.ces-transaction.com/CN/10.19595/j.cnki.1000-6753.tces.210022 https://dgjsxb.ces-transaction.com/CN/Y2022/V37/I5/1294

[1] Xu Shuyan, Ostrikov K N, Li Y, et al.Low-frequency, high-density, inductively coupled plasma sources: operation and applications[J]. Physics of Plasmas, 2001, 8(5): 2549-2557.
[2] Hopwood J, Guarnieri C R, Whitehair S J, et al.Langmuir probe measurements of a radio frequency induction plasma[J]. Journal of Vacuum Science & Technology A, 1993, 11:152-156.
[3] Godyak V A, Alexandrovich B M.Plasma and electrical characteristics of inductive discharge in a magnetic field[J]. Physics of Plasmas, 2004, 11(7): 3553-3560.
[4] Amorim J, Maciel H S, Sudano J P.High-density plasma mode of an inductively coupled radio frequency discharge[J]. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 1991, 9(2): 362-365.
[5] 戴栋, 宁文军, 邵涛. 大气压低温等离子体的研究现状与发展趋势[J]. 电工技术学报, 2017, 32(20): 1-9.
Dai Dong, Ning Wenjun, Shao Tao.A review on the state of art and future trends of atmospheric pressure low temperature plasmas[J]. Transactions of China Electrotechnical Society, 2017, 32(20):1-9.
[6] Lee H C, Chung C W.E-H heating mode transition in inductive discharges with different antenna sizes[J]. Physics of Plasmas, 2015, 22: 053505.
[7] Lee H C, Chung C W.Effect of antenna size on electron kinetics in inductively coupled plasmas[J]. Physics of Plasmas, 2013, 20: 101607.
[8] Jun H S, Chang H Y.Development of 40 MHz inductively coupled plasma source and frequency effects on plasma parameters[J]. Applied Physics Letters, 2008, 92: 041501.
[9] Ventzek P L G, Hoekstra R J, Kushner M J. Two-dimensional modeling of high plasma density inductively coupled sources for materials Proeessing[J]. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 1994, 12(1): 461-477.
[10] Fukasawa T, Nouda T, Nakamura A, et al.RF self-bias characteristics in inductively coupled plasma[J]. Japanese Journal of Applied Physics, 1993, 32: 6076-6079.
[11] 张昀, 王波, 王荷军. 射频感应耦合等离子体郎缪双探针诊断分析[J]. 真空, 2016, 53(3): 56-61.
Zhang Yun, Wang Bo, Wang Hejun.Langmuir double probe diagnostic analysis of RF inductively coupled plasma[J]. Vacuum, 2016, 53(3): 56-61.
[12] 汪建. 射频电感耦合等离子体及模式转变的实验研究[D]. 合肥: 中国科学技术大学,2014.
[13] 朱寒, 何湘, 陈秉岩, 等. 容性耦合射频放电等离子体的仿真模拟与实验诊断研究[J]. 电工技术学报, 2019, 34(16): 3504-3511.
Zhu Han, He Xiang, Chen Bingyan, et al.Simulations and experimental diagnostic of capacitively coupled RF discharge plasma[J]. Transactions of China Electrotechnical Society, 2019, 34(16): 3504-3511.
[14] 张改玲, 滑跃, 郝泽宇, 等. 13.56MHz/2MHz柱状感性耦合等离子体参数的对比研究[J]. 物理学报, 2019, 68(10): 105202.
Zhang Gailing, Hua Yue, Hao Zeyu, et al.Experimental investigation of plasma parameters in 13.56MHz/2MHz cylindrical inductively coupled plasma[J]. Acta Physica Sinica, 2019, 68(10): 105202.
[15] 李亦非, 付宸聪, 蔡国飙, 等. 微型射频离子推进器放电等离子体全局模型仿真研究[J]. 电工技术学报, 2021, 36(15): 3113-3123.
Li Yifei, Fu Chencong, Cai Guobiao, et al.Global model co-simulation of RF ion thruster based on multi-physical field coupling[J]. Transactions of China Electrotechnical Society, 2021, 36(15): 3113-3123.
[16] 桑建华. 飞行器隐身技术[M]. 北京: 航空工业出版社, 2013.
[17] 何湘. 飞机局部等离子体隐身探索研究[D]. 南京: 南京理工大学, 2010.
[18] Wen Deqi, Liu Wei, Gao Fei, et al.A hybrid m Model of radio frequency biase d inductively coupled plasma discharges: description of model and experimental validation in argon[J]. Plasma Sources Science and Technology, 2016, 25(4): 045009.
[19] 苏晨, 徐浩军, 林敏. 封闭式等离子体发生器设计及其放电等离子体参数分布实验研究[J]. 高电压技术, 2013, 39(7): 1668-1673.
Su Chen, Xu Hao Jun, Lin Min.Design on closed plasma generator and experimental study on its plasma parameters distribution[J]. High Voltage Engingeering, 2013, 39(7): 1668-1673.
[20] 梅丹华, 方志, 邵涛. 大气压低温等离子体特性与应用研究现状[J]. 中国电机工程学报, 2020, 40(4): 1339-1358, 1425.
Mei Danhua, Fang Zhi, Shao Tao.Recent progress on characteristics and applications of atmospheric pressure low temperature plasmas[J]. Proceedings of the CSEE, 2020, 40(4): 1339-1358, 1425.
[21] 万静, 宁文军, 张雨晖, 等. 气隙宽度对大气压氦气介质阻挡放电多脉冲特性影响的仿真研究[J]. 电工技术学报, 2019, 34(4): 871-879.
Wan Jing, Ning Wenjun, Zhang Yuhui, et al.Influence of gap width on the multipeak characteristics of atmospheric pressure helium dielectric barrier discharges-a numerical approach[J]. Transactions of China Electrotechnical Society, 2019, 34(4): 871-879.
[22] 田微, 盖斐, 张俊敏, 等. 径向放电的等离子体阴极脉冲电子束实验研究[J]. 电工技术学报, 2019, 34(6): 1338-1344.
Tian Wei, Gai Fei, Zhang Junmin, et al.Experiment research on pulse electron beam of plasma cathode with radial discharge[J]. Transactions of China Electrotechnical Society, 2019, 34(6): 1338-1344.
[23] 林茂, 徐浩军, 魏小龙, 等. 放电功率变化对电磁波在电感耦合闭式等离子体中的衰减特性[J]. 强激光与粒子束, 2021, 33(6): 065012(1-8).
Lin Mao, Xu Haojun, Wei Xiaolong, et al. Research on attenuation characteristics of electromagnetic wave in ICP plasma based on variation of discharge power[J]. High Power Laser and Particle Beams, 2021, 33(6): 065012(1-8).