基于二元布气的大气压等离子体沉积TiO<sub>2</sub>功能层提高陶瓷表面绝缘性能

doi:10.19595/j.cnki.1000-6753.tces.210609

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摘要真空/固体介质界面的绝缘性能相对较低,真空沿面闪络现象时有发生,严重威胁高压电气设备、脉冲功率系统的安全可靠运行。为提高陶瓷材料在真空中的表面绝缘性能,该文采用大气压等离子体沉积技术,以钛酸四乙酯与乙醇的混合溶液为前驱物,利用二元布气的反应器在陶瓷表面沉积二氧化钛（TiO₂）薄膜。通过调控沉积条件,得到均匀致密的TiO₂功能层,并对沉积改性前后材料表面的理化特性、表面电荷特性、电荷陷阱分布以及在真空中的沿面闪络特性进行测量和表征。实验结果表明：当基底温度为25℃时,大气压等离子体沉积处理在陶瓷表面引入TiO₂功能层后,样品表面陷阱能级最低,电荷消散速度最快,与未处理样品相比,闪络电压提高39%;当基底温度升高至80℃时,TiO₂功能层致密均匀,样品表面陷阱能级最高,电荷陷阱逐渐变为深陷阱,闪络电压提高58%。通过大气压等离子体改性技术在绝缘材料表面沉积TiO₂功能层,能够有效提高陶瓷的表面绝缘性能,为后续工程应用提供新的改性途径。

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关键词 ：大气压等离子体, 沉积氧化铝, 陶瓷TiO₂, 表面电荷, 闪络电压

Abstract：The insulation performance of vacuum/solid interface is low comparatively, and vacuum flashover occurs sometimes. This problem seriously threatens the safe and reliable operation of high voltage electrical equipment and pulse power system. In order to improve the surface insulation performance of ceramic materials in vacuum, atmospheric pressure plasma deposition technology is used to deposit titanium dioxide (TiO₂) layers on the surface of ceramic materials. The reactor is designed with binary gas distribution. The solution of tetraethyl titanate and ethanol are mixed as the precursor. By control the deposition conditions, the uniform and dense TiO₂ functional layer is obtained. The physical and chemical properties, surface charge characteristics, charge trap distribution and surface flashover characteristics in vacuum are measured and characterized. The experimental results show that when the substrate temperature is 25℃, after introducing TiO₂ functional layer on ceramic surface by atmospheric pressure plasma deposition, the trap energy level of the sample is the lowest and the charge dissipation rate is the fastest. And the flashover voltage increases by 39% compared with the untreated sample. When the temperature increases to 80℃, the TiO₂ functional layer becomes uniform and dense. And the surface trap energy level is the highest, the charge trap gradually becomes deep, and the flashover voltage increases by 58%. TiO₂ functional layer deposited on ceramic by atmospheric pressure plasma deposition technology can effectively improve the surface insulation performance is proved. Also a new modification method for subsequent engineering applications is provided.

Key words： Atmospheric pressure plasma deposition aluminum ceramic TiO₂ surface charge flashover voltage

收稿日期: 2021-04-29

PACS:

TM215

通讯作者: 孔飞男,1987年生,博士,副研究员,研究方向为放电等离子体应用、高电压与绝缘技术。E-mail：kongfei@mail.iee.ac.cn

作者简介: 赵鸣鸣女,1997年生,硕士研究生,研究方向为放电等离子体沉积改性技术。E-mail：zhaomingming@mail.iee.ac.cn

引用本文:

赵鸣鸣, 于维鑫, 孔飞, 章程, 程显, 邵涛. 基于二元布气的大气压等离子体沉积TiO₂功能层提高陶瓷表面绝缘性能[J]. 电工技术学报, 2022, 37(13): 3404-3412. Zhao Mingming, Yu Weixin, Kong Fei, Zhang Cheng, Cheng Xian, Shao Tao. Improvement of Surface Insulating Properties of Ceramics by Deposition of TiO₂ Functional Layer by Atmospheric Pressure Plasma with Binary Gas Distribution. Transactions of China Electrotechnical Society, 2022, 37(13): 3404-3412.

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https://dgjsxb.ces-transaction.com/CN/10.19595/j.cnki.1000-6753.tces.210609 https://dgjsxb.ces-transaction.com/CN/Y2022/V37/I13/3404

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