Improvement of Surface Insulating Properties of Ceramics by Deposition of TiO2 Functional Layer by Atmospheric Pressure Plasma with Binary Gas Distribution
1.School of Electrical Engineering Zhengzhou University Zhengzhou 450052 China; 2. Beijing International S&T Cooperation Base for Plasma Science and Energy Conversion Institute of Electrical Engineering Chinese Academy of Sciences Beijing 100190 China; 3. University of Chinese Academy of Sciences Beijing 100049 China
Abstract：The insulation performance of vacuum/solid interface is low comparatively, and vacuum flashover occurs sometimes. This problem seriously threatens the safe and reliable operation of high voltage electrical equipment and pulse power system. In order to improve the surface insulation performance of ceramic materials in vacuum, atmospheric pressure plasma deposition technology is used to deposit titanium dioxide (TiO2) layers on the surface of ceramic materials. The reactor is designed with binary gas distribution. The solution of tetraethyl titanate and ethanol are mixed as the precursor. By control the deposition conditions, the uniform and dense TiO2 functional layer is obtained. The physical and chemical properties, surface charge characteristics, charge trap distribution and surface flashover characteristics in vacuum are measured and characterized. The experimental results show that when the substrate temperature is 25℃, after introducing TiO2 functional layer on ceramic surface by atmospheric pressure plasma deposition, the trap energy level of the sample is the lowest and the charge dissipation rate is the fastest. And the flashover voltage increases by 39% compared with the untreated sample. When the temperature increases to 80℃, the TiO2 functional layer becomes uniform and dense. And the surface trap energy level is the highest, the charge trap gradually becomes deep, and the flashover voltage increases by 58%. TiO2 functional layer deposited on ceramic by atmospheric pressure plasma deposition technology can effectively improve the surface insulation performance is proved. Also a new modification method for subsequent engineering applications is provided.
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2022, Vol. 37 
