Abstract：In order to produce low tempreture plasma jet containing high active fluorine and to optimize its efficiency as well, the effects of CF4 content on the discharge characteristics of Argon plasma jet under atmospheric pressure are investigated by means of electrical properties measurements, including the voltage-current waveforms and the Lissajous figures, and optical properties measurements, including light-emission images and optical emission spectra. The trends of the main discharge parameters, such as discharge power, transferred charges, and the spectrum line intensities of the main particles in the discharge, changing with CF4 contents are calculated from the measured electrical and optical characteristics. And the experimental results are analyzed from the view point of discharge ionization process. Results show that with the increase of CF4 content within the Ar/CF4 plasma jet, the number of current pulses reduces, the pulse duration time and jet length become shorter, the lighting emission intensity becomes weaker, and the discharge power and the transferred charges also decrease. The spectrum line intensities for other particles except F decrease with the increase of CF4 content. The spectrum line intensity of F achieves its maximum value when the CF4 content is 4%,which suggests that the amounts of F containing groups is the most at this case. Under this condition the plasma jet can be used for hydrophobic surface modification of the insulation materials to achieve preferable results.
[1] Lu X,Laroussi M,Puech V.On atmospheric-pressure non-equilibrium plasma jets and plasma bullets[J].Plasma Sources Science and Technology,2012,21(3):34005-34021. [2] Xian Y,Zhang P,Pei X,et al.Study on plasma jets generated with different working gases and propagating in different surrounding gases[J].IEEE Transactions on Plasma Science,2014,42(10):2448-2449. [3] Shao T,Zhang C,Wang R X,et al.Comparison of atmospheric-pressure He and Ar plasma jets driven by microsecond pulses[J].IEEE Transactions on Plasma Science,2015,43(3):726-732. [4] 方志,刘源,蔡玲玲.大气压氩等离子体射流的放电特性[J].高电压技术,2012,38(7):1613-1622. Fang Zhi,Liu Yuan,Cai Lingling.Discharge characteristics of atmosphere pressure plasma jet in Ar[J].High Voltage Engineering,2012,38(7):1613-1622. [5] Fang Z,Yang J R,Liu Yuan,et al.Surface treatment of polyethylene terephthalate to improving hydrophilicity using atmospheric pressure plasma jet[J].IEEE Transactions on Plasma Science,2013,41(6):1627-1634. [6] Kostov K G,Nishime T M C,Castro A H R,et al.Surface modification of polymeric materials by cold atmospheric plasma jet[J].Applied Surface Science,2014,314(10):367-375. [7] 卢新培.等离子体射流及其医学应用[J].高电压技术,2011,37(6):1416-1425. Lu Xinpei.Plasma jets and their biomedical application[J].High Voltage Engineering,2011,37(6):1416-1425. [8] Weltmann K D,Fricke K,Stieber M,et al.New nonthermal atmospheric-pressure plasma sources for decontamination of human extremities[J].IEEE Transactions on Plasma Science,2012,40(11):2963-2969. [9] Shao X J,Jiang N,Zhang G J,et al.Comparative study on the atmospheric pressure plasma jets of helium and argon[J].Applied Physics Letters,2012,101(25):253509. [10]Kwong C H,Ng S P,Kan C W,et al.Parametric study of CF4-plasma on the hydrophobicity of polyester synthetic leather[J].Fibers and Polymers,2013,14(10):1608-1613. [11]Vogelsang A,Ohl A,Foest R,et al.Fluorocarbon plasma polymer deposition by an atmospheric pressure microplasma jet using different precursor molecules—a comparative study[J].Plasma Processes and Polymers,2013,10(4):364-371. [12]Kim S H,Kim J H,Kang B K,et al.Superhydrop-hobic CFx coating via in-line atmospheric RF plasma of He-CF4-H2[J].Langmuir:The ACS Journal of Surfaces and Colloids,2005,21(26):12213-12217. [13]Gao Z,Sun J,Peng S,et al.Surface modification of a polyamide 6 film by He/CF4 plasma using atmospheric pressure plasma jet[J].Applied Surface Science,2009,256(5):1496-1501. [14]Han D, Moon S Y. Development of superhydrophobic surface on glass substrate by multi-step atmospheric pressure plasma treatment[J]. Thin Solid Films, 2015, 587(7): 34-38. [15]Gorjanc M,Jazbec K,Zaplotnik R.Tailoring surface morphology of cotton fibers using mild tetrafluoromethane plasma treatment[J].Journal of the Textile Institute,2014,105(11):1178-1186. [16]周亦骁,方志,邵涛.Ar/O2和Ar/H2O中大气压等离子体射流放电特性的比较[J].电工技术学报,2014,29(11):229-238. Zhou Yixiao,Fang Zhi,Shao Tao.Comparison of discharge characteristics of atmospheric pressure plasma jet in Ar/O2 and Ar/H2O mixtures[J].Transactions of China Electrotechnical Society,2014,29(11):229-238. [17]郝艳捧,涂恩来,阳林,等.基于气隙伏安特性研究大气压氦气辉光放电的模式和机理[J].电工技术学报,2010,25(7):24-30. Hao Yanpeng,Tu Enlai,Yang Lin,et al.Mode and mechanism of multi-pulse glow discharges in helium at atmospheric pressure based on voltage-current characteristics[J].Transactions of China Electrotechnical Society,2010,25(7):24-30. [18]Shao X J,Zhang G J,Zhan J Y,et al.Research on surface modification of polytetrafluoroethylene coupled with argon dielectric barrier discharge plasma jet characteristics[J].IEEE Transactions on Plasma Science,2011,39(11):3095-3102. [19]Sarani A,Nikiforov A,Leys C.Atmospheric pressure plasma jet in Ar and Ar/H2O mixtures:optical emission spectroscopy and temperature measurements[J].Physics of Plasma,2010,17(3):635-639. [20]方志,靳君,张荐,等.大气压Ar/H2O等离子体射流的放电特性[J].高电压技术,2014,40(7):2049-2056. Fang Zhi,Jin Jun,Zhang Jian,et al.Characteristics of atmospheric pressure Ar/H2O plasma jet discharge[J].High Voltage Engineering,2014,40(7):2049-2056. [21]章程,邵涛,龙凯华,等.大气压空气中纳秒脉冲介质阻挡放电均匀性的研究[J].电工技术学报,2010,25(1):30-36. Zhang Cheng,Shao Tao,Long Kaihua,et al.Uniform of unipolar nanosecond pulse DBD in atmospheric air[J].Transactions of China Electrotechnical Society,2010,25(1):30-36. [22]Kim J Y,Kim J H,Kim H,et al.Plasma jet-to-jet coupling behavior between two plasma jet arrays for surface treatments requiring strong discharge process[J].IEEE Transactions on Plasma Science,2014,42(10):2474-2475. [23]Topala I,Asandulesa M,Spridon D,et al.Hydrophobic coatings obtained in atmospheric pressure plasma[J].IEEE Transactions on Plasma Science,2009,37(6):946-950. [24]Shao T,Yang W,Zhang C,et al.Enhanced surface flashover strength in vacuum of polymethylmethacrylate by surface modification using atmospheric-pressure dielectric barrier discharge[J].Applied Physics Letters,2014,105(7):071607. [25]Xu J,Zhang C,Shao T,et al.Formation of hydrophobic coating on PMMA surface using unipolar nanosecond-pulse DBD in atmospheric air[J].Journal of Electrostatics,2013,71(3):435-439.
2016, Vol. 31 
