大气压湿空气纳秒脉冲介质阻挡放电研究

doi:10.19595/j.cnki.1000-6753.tces.240716

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摘要

该文主要研究大气压湿空气条件下纳秒脉冲平行平板介质阻挡放电（DBD）的放电和发射光谱特性。首先,基于DBD等效电路模型计算得到了脉冲上升沿和下降沿阶段的气隙击穿电压。特别地,随着脉冲上升和下降时间的增大（50~500 ns）,上升沿击穿电压降低,而下降沿击穿电压先降低后增加,由此导致放电功率和氮气谱线强度在200~300 ns范围内存在极小值。并且发现击穿电压与湿度近似呈线性关系,拟合得到完全干燥空气的上升沿击穿电压为7.19 kV（1 mm气隙）,且相对湿度每上升20%,击穿电压提高0.14 kV。在给定实验参数范围下,氮气分子的发射光谱强度与放电功率近似成正比,而受具体脉冲参数的影响较小,表明放电功率对放电产物的线性调控作用。最后,基于流注理论提出了简化模型用于估算纳秒脉冲放电的击穿电压。

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	王凯
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关键词 ：大气压, 湿空气, 纳秒脉冲, 介质阻挡放电（DBD）

Abstract：

Atmospheric pressure dielectric barrier discharge (DBD) is an emerging technology with significant potential for environmental and biomedical applications. Compared to alternating-current (AC) DBD, nanosecond pulsed DBD demonstrates several unique advantages, including lower operational temperature, improved discharge uniformity, and higher electron energy. These attributes are particularly advantageous for enhancing the generation of reactive species. Previous research has primarily examined the influence of individual pulse parameters (e.g., voltage amplitude and pulse frequency) on pulsed DBD performance. However, comprehensive investigations comparing multiple parameters, particularly the role of discharge power in reactive species generation, remain scarce. Furthermore, while it is well-established that humidity affects electron attachment and ionization thresholds, its quantitative impact on the breakdown dynamics and plasma chemistry of nanosecond-pulsed DBDs has not been thoroughly studied.
This study explores the discharge characteristics and emission spectral properties of a nanosecond-pulsed parallel-plate DBD operating in humid air. An equivalent circuit model was utilized to calculate gap breakdown voltages during the pulse's rising and falling phases. Additionally, optical emission spectroscopy (OES) was employed to characterize the behavior of reactive species.
Increasing the pulse voltage amplitude (8~16 kV) raises both the rising-edge (6.8~7.5 kV) and falling-edge (3.7~6.9 kV) breakdown voltages, with discharge power increasing proportionally (6.1~23 W). Extending the pulse rise/fall time (50~500 ns) reduces the rising-edge breakdown voltage (7.2~5.0 kV) but results in a local minimum for both the falling-edge breakdown voltage and discharge power at 200~300 ns. The increased breakdown voltage with the rising voltage rate has been widely reported and is attributed to the characteristic breakdown delay time associated with nanosecond-pulsed voltages. In contrast, the observed increase in fall-edge breakdown voltage and discharge power within the pulse rise time of 300~500 ns may result from the longer time interval between the rising and falling edges, which allows for gradual recovery of gas insulation, including gas density restoration and electrical neutrality re-establishment. Higher pulse frequencies (0.5~5 kHz) decrease breakdown voltages (7.4~6.9 kV) and single-pulse energy, leading to a weaker linear dependence of discharge power on pulse frequency. Additionally, both breakdown voltage and discharge power increase with humidity, while plasma emission decreases principally due to the quenching reactions induced by water molecules. In dry air (1 mm gap), the rising-phase breakdown voltage is approximately 7.19 kV, increasing by 0.14 kV for every 20% rise in relative humidity (RH).
In summary, discharge power positively correlates with gap breakdown voltage under all conditions. It is also found that nitrogen emission intensities exhibited a near-linear proportionality to discharge power across all conditions, regardless of specific pulse parameters. This universal relationship highlights discharge power as a potential control parameter for regulating plasma chemistry. Given the critical role of breakdown voltage, a simplified streamer-based framework was developed to predict the pulsed breakdown voltage. By integrating Raether-Meek criteria and electron transport parameters (derived from Boltzmann equation solvers), the model successfully predicts breakdown voltages under varying gap electric field rise rates (0.5~2 kV/cm·ns). Experimental validation confirmed its alignment with observed trends.
In conclusion, this study enhances the understanding of nanosecond-pulsed DBDs in humid environments by clarifying the interrelationships between pulse parameters, humidity, and plasma emission behaviors. The observed linear correlation between discharge power and nitrogen emission intensity offers a scalable approach for optimizing reactive species generation. Moreover, the proposed model enables breakdown voltage estimation under a pulsed power excitation, supporting the development of energy-efficient plasma systems and the precise control of reactive species under real-world atmospheric conditions.

Key words： Atmospheric pressure humid air nanosecond pulsed dielectric barrier discharge (DBD)

收稿日期: 2024-05-07

PACS:

TM614

基金资助:

国家自然科学基金（52407176）和国家资助博士后研究人员计划（GZB20230326）资助项目

通讯作者: 张丽阳 1996年生,助理研究员,研究方向为低温等离子体及其应用。E-mail: zhang_ly@tsinghua.edu.cn

作者简介: 王凯 1995年生,硕士,研究方向为低温等离子体及其应用。E-mail: wk_wake@163.com

引用本文:

王凯, 张丽阳, 吴凯玥, 罗海云. 大气压湿空气纳秒脉冲介质阻挡放电研究[J]. 电工技术学报, 2025, 40(16): 5355-5368. Wang Kai, Zhang Liyang, Wu Kaiyue, Luo Haiyun. Atmospheric Pressure Nanosecond Pulsed Dielectric Barrier Discharge in Humid Air. Transactions of China Electrotechnical Society, 2025, 40(16): 5355-5368.

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