Effect of Silane Coupling Agent Modified Nano-AlN on Electrical and Aging Properties of Silicone Elastomer for SiC Device Packaging
Chen Xiangrong1,2,3, Wang Qilong1,2, Huang Xiaofan1, Zhang Tianyin1, Ren Na2
1. College of Electrical Engineering Zhejiang University Hangzhou 310027 China 2. Hangzhou Global Scientific and Technological Innovation Center Zhejiang University Hangzhou 311200 China 3. Advanced Electrical International Research Center Zhejiang University Haining 314400 China
Abstract：To study the effect of the silane coupling agent modified nano-aluminum nitride (AlN) fillers on the electrical and high-temperature aging properties of the silicone elastomer, the pure silicone elastomer and its silane coupling agent modified nanocomposites were thermally aged for 500h under 250℃. The samples before and after aging were subjected to morphology analysis, SEM cross-section characterization, thermogravimetric analysis (TGA), DC conductivity and depolarization current testing, space charge measurement, dielectric spectroscopy, DC breakdown experiment and quantum chemical calculations (QCC). The interface state variation between the silicone elastomer matrix and the nano-AlN during the thermal aging process was analyzed, and the interface models before and after thermal aging were proposed. The results show that the pure silicone elastomer produces a large number of chain scission and internal micropores after thermal aging due to thermal decomposition, and its shallow trap density increases. Before thermal aging, an interfacial gap exists between the silicone elastomer matrix and nano-AlN, decreasing the shallow trap depth. The interface state before and after aging has an obvious effect on the thermal stability and electrical properties of the silicone elastomer nanocomposites. The chemical bonds and hydrogen bonds are formed between the silicone elastomer matrix and the nano-AlN after thermal aging, which not only improves thermal decomposition temperature, but also increases deep traps depth and density. Compared with the aged pure silicone elastomer, the aged nanocomposites have lower DC conductivity, less space charge accumulation, and higher DC breakdown strength, especially, 3% nanocomposite has the best thermal decomposition inhibition effect. The results show that the silane coupling agent modified nano-AlN fillers with an appropriate doping amount can improve the electrical and aging properties of the silicone elastomer obviously, meeting the long-term high-temperature application requirement of the silicon carbide device packaging materials.
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