Research of Discharge in Micro-Gap Based on Atomic Force Microscope
Sun Zhi1,2, Fu Linqing1,3, Gao Xin1, Han Bai1, Sun Weifeng1
1. State Key Laboratory Breeding Base of Dielectrics Engineering Harbin University of Science and Technology Harbin 150080 China; 2. Institute for Nanotechnology University of Waterloo Waterloo N2L3Gl Canada; 3. Zaozhuang Power Supply Company of State Grid Shangdong Electric Power Company Zaozhuang 277000 China
Abstract：Micro-discharge plasma has been widely used in many fields, but the Thomson discharge theory can’t reasonably explain mesoscopic-scale air discharge phenomenon. In order to further explore the micro-gap air discharge characteristics and to determine the effect of field emission on micro-scale air discharge, the precision displacement plate and atomic force microscope (AFM) were used to construct the pin-plate electrode structure which can realize the micrometer distance control. The phenomena and mechanism of micro-gap discharge were investigated when the DC voltage was applied in atmosphere environment. The results show that the micro-gap discharge mechanism is very different from that between the long gap. When the gap is about 15 μm, non-uniform electric field discharge generates continuous glow discharge or intermittent spark discharge. When the gap is less than 2 μm, there is no glow discharge occurs. Fowler-Nordheim formula describes the same phenomena that breakdown voltage does not change with the gap distance, denoting that is the field emission mechanism. Cathode field emission discharge makes the negative breakdown voltage to be lower than the positive gap breakdown voltage in the same gap. The precise locating and in situ morphological characterization of pin-plate electrode discharging in micro-regions were achieved by AFM.
孙志, 付琳清, 高鑫, 韩柏, 孙伟峰. 基于原子力显微镜的微间隙空气放电研究[J]. 电工技术学报, 2018, 33(23): 5616-5624.
Sun Zhi, Fu Linqing, Gao Xin, Han Bai, Sun Weifeng. Research of Discharge in Micro-Gap Based on Atomic Force Microscope. Transactions of China Electrotechnical Society, 2018, 33(23): 5616-5624.
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