基于二元布气的大气压等离子体沉积TiO<sub>2</sub>功能层提高陶瓷表面绝缘性能

doi:10.19595/j.cnki.1000-6753.tces.210609

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Abstract The insulation performance of vacuum/solid interface is low comparatively, and vacuum flashover occurs sometimes. This problem seriously threatens the safe and reliable operation of high voltage electrical equipment and pulse power system. In order to improve the surface insulation performance of ceramic materials in vacuum, atmospheric pressure plasma deposition technology is used to deposit titanium dioxide (TiO₂) layers on the surface of ceramic materials. The reactor is designed with binary gas distribution. The solution of tetraethyl titanate and ethanol are mixed as the precursor. By control the deposition conditions, the uniform and dense TiO₂ functional layer is obtained. The physical and chemical properties, surface charge characteristics, charge trap distribution and surface flashover characteristics in vacuum are measured and characterized. The experimental results show that when the substrate temperature is 25℃, after introducing TiO₂ functional layer on ceramic surface by atmospheric pressure plasma deposition, the trap energy level of the sample is the lowest and the charge dissipation rate is the fastest. And the flashover voltage increases by 39% compared with the untreated sample. When the temperature increases to 80℃, the TiO₂ functional layer becomes uniform and dense. And the surface trap energy level is the highest, the charge trap gradually becomes deep, and the flashover voltage increases by 58%. TiO₂ functional layer deposited on ceramic by atmospheric pressure plasma deposition technology can effectively improve the surface insulation performance is proved. Also a new modification method for subsequent engineering applications is provided.

Key words： Atmospheric pressure plasma deposition aluminum ceramic TiO₂ surface charge flashover voltage

Received: 29 April 2021

PACS:

TM215

Fund:国家自然科学基金（51925703, 51807189, 52037004）和电力系统及大型发电设备安全控制与仿真国家重点实验室开放研究课题（SKLD20M02）资助项目

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	Zhao Mingming
	Yu Weixin
	Kong Fei
	Zhang Cheng
	Cheng Xian
	Shao Tao

Cite this article:

Zhao Mingming,Yu Weixin,Kong Fei等. Improvement of Surface Insulating Properties of Ceramics by Deposition of TiO₂ Functional Layer by Atmospheric Pressure Plasma with Binary Gas Distribution[J]. Transactions of China Electrotechnical Society, 2022, 37(13): 3404-3412.

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https://dgjsxb.ces-transaction.com/EN/10.19595/j.cnki.1000-6753.tces.210609 OR https://dgjsxb.ces-transaction.com/EN/Y2022/V37/I13/3404

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