Abstract：Voice coil motor is a linear motor that can convert electrical energy into linear motion mechanical energy without any mechanical transmission. Due to the advantages of simple structure, small size, fast response speed, high positioning accuracy and easy control, voice coil motors are widely used in many electrical fields. This paper briefly described the theoretical basis of the voice coil motor, and explained the working principle, structural classification and characteristics of each structure of voice coil motor. Besides, based on the research of domestic and foreign scholars on the structure optimization of voice coil motor, this paper summarized the methods of improving the force constant and positioning accuracy of voice coil motor. Furthermore, the main application fields of voice coil motor were summarized, and their development trends and research hotspots were discussed and prospected.
[1] Chen S Y, Lin Heru, Yang Mengchen, et al.Fractional- order fuzzy PID contouring control for a VCMs- based x-y motion stage[C]//International Conference on Control, Automation and Robotics, Singapore, 2020: 236-241. [2] Chen S Y, Lee C Y.Digital signal processor based intelligent fractional-order sliding-mode control for a linear voice coil actuator[J]. IET Control Theory & Applications, 2017, 11(8): 282-1292. [3] Cao Yu, Wang Haitao, Lü Tao, et al.Research on large caliber FSM digital control system based on voice coil motor[C]//IEEE Advanced Information Technology, Electronic and Automation Control Conference, Chengdu, China, 2019: 2778-2781. [4] Wang Baochao, Liu Cheng, Wu Zhiwei, et al.LCL filter design and implementation for improving transient position tracking control performance of voice coil motor[J]. IEEE Access, 2020, 8: 4963-4971. [5] 凌志健, 赵文祥, 吉敬华. 高推力永磁直线作动器及其关键技术综述[J]. 电工技术学报, 2020, 35(5): 1022-1035. Ling Zhijian, Zhao Wenxiang, Ji Jinghua.Overview of high force density permanent magnet linear actuator and its key technology[J]. Transactions of China Electrotechnical Society, 2020, 35(5): 1022-1035. [6] 张春雷, 张辉, 叶佩青, 等. 两相圆筒型永磁同步直线电机无传感算法[J]. 电工技术学报, 2019, 34(23): 4901-4908. Zhang Chunlei, Zhang Hui, Ye Peiqing, et al.Research on sensorless algorithm of two phase tubular permanent magnet synchronous linear motor[J]. Transactions of China Electrotechnical Society, 2019, 34(23): 4901-4908. [7] Huang Weikang, Cao Li, Huang Wenxin, et al.Research on voice coil motor for a new construction with wireless power supply[C]//International Con- ference on Electrical Machines and Systems, Harbin, China, 2019: 1-6. [8] 陈晓, 赵文祥, 吉敬华, 等. 考虑边端效应的双边直线永磁游标电机模型预测电流控制[J]. 电工技术学报, 2019, 34(1): 49-57. Chen Xiao, Zhao Wenxiang, Ji Jinghua, et al.Model predictive current control of double-side linear vernier permanent magnet machines considering end effect[J]. Transactions of China Electrotechnical Society, 2019, 34(1): 49-57. [9] 秦伟, 范瑜, 徐洪泽, 等. 高温超导运动磁场电磁Halbach初级结构直线感应磁悬浮电机[J]. 电工技术学报, 2018, 33(23): 5427-5434. Qin Wei, Fan Yu, Xu Hongze, et al.A linear induction maglev motor with HTS traveling magnetic electromagnetic Halbach array[J]. Transactions of China Electrotechnical Society, 2018, 33(23): 5427-5434. [10] 许孝卓, 孙震, 汪旭东, 等. Halbach交替极永磁同步直线电机特性分析[J]. 电工技术学报, 2019, 34(9): 1825-1833. Xu Xiaozhuo, Sun Zhen, Wang Xudong, et al.Characteristic of a novel permanent magnet linear synchronous motor with Halbach array consequent- pole[J]. Transactions of China Electrotechnical Society, 2019, 34(9): 1825-1833. [11] Ma Guangtong, Gong Tianyong, Zhang Han, et al.Experiment and simulation of REBCO conductor coils for an HTS linear synchronous motor[J]. IEEE Transactions on Applied Superconductivity, 2017, 27(4): 1-5. [12] 杨光. 基于三维磁场计算的永磁音圈电机结构优化设计[D]. 天津: 天津大学, 2004. [13] 常雪峰, 陈幼平, 艾武, 等. 音圈直线电动机设计、控制及应用综述[J]. 微电机, 2008, 41(11): 66-69. Chang Xuefeng, Chen Youping, Ai Wu, et al.Design and control application of voice coil linear motors[J]. Micromotors, 2008, 41(11): 66-69. [14] 张阳, 周惠兴, 曹荣敏, 等. 基于有限元分析的弧形音圈电机综合优化设计[J]. 微电机, 2010, 43(11): 28-33. Zhang Yang, Zhou Huixing, Cao Rongmin, et al.Comprehensive optimization design of a rotary VCM based on FEM[J]. Micromotors, 2010, 43(11): 28-33. [15] 兴连国, 周惠兴, 侯书林, 等. 音圈电机研究及应用综述[J]. 微电机, 2011, 44(8): 82-87. Xing Lianguo, Zhou Huixing, Hou Shulin, et al.Research and application of voice coil motor[J]. MicroMotors, 2011, 44(8): 82-87. [16] 张大卫, 冯晓梅. 音圈电机的技术原理[J]. 中北大学学报: 自然科学版, 2006, 27(3): 224-228. Zhang David, Feng Xiaomei.Technical principles of voice coil motor[J]. Journal of North University of China: Natural Science Edition, 2006, 27(3): 224-228. [17] 王晓远, 杨光, 闫杰. 两种结构的光盘驱动器音圈电机性能分析[J]. 微电机, 2005, 38(2): 7-9. Wang Xiaoyuan, Yang Guang, Yan Jie.Performance analysis of two voice coils motors wiyt different kinds of structure for disk driver[J]. Micromotors, 2005, 38(2): 7-9. [18] 王道生. 高速高精度磁头定位机构的设计[J]. 电子计算机参考资料, 1978(7): 58-76. Wang Daosheng.Design of high speed and high precision magnetic head positioning mechanism[J]. Computer Engineering and Applications, 1978(7): 58-76. [19] 何松波, 顾鸿祥. 自屏蔽式音圈电机[J]. 计算机研究与发展, 1984(4): 27-34. He Songbo, Gu Hongxiang.Self-shielded voice coil motor[J]. Journal of Computer Research and Deve- lopment, 1984(4): 27-34. [20] Gong Zhean, Zhang Zhishen, Zhang Longlong, et al.Reliability enhancement test of vertical voice-coil motor on wafer stage of lithography machine[C]// International Conference on Quality, Chengdu, China, 2013: 991-995. [21] 罗敢, 王岳环, 张彪. 光刻机光头调焦音圈电机的结构设计[J]. 微电机, 1998, 31(6): 7-11. Luo Gan, Wang Yuehuan, Zhang Biao.VCM structure design for optical-head focusing in optical pre- etching machine[J]. Micromotors, 1998, 31(6): 7-11. [22] 张宝铭, 王春茹. 高精度音圈电动机[J]. 微电机, 1995, 28(1): 50-51. Zhang Baoming, Wang Chunru.High-precision voice coil motor[J]. Micromotors, 1995, 28(1): 50-51. [23] 冯胜东. 大量程触针式仪器测力控制系统研究[D]. 武汉: 华中科技大学, 2015. [24] Rashidi A S, 杨媛霞. 用希土磁钢改善音圈电机性能[J]. 电子计算机动态, 1979(2): 40-42. Rashidi A S, Yang Yuanxia.Improving the per- formance of voice coil motors with rare earth magnets[J]. Journal of Computer Research and Development, 1979(2): 40-42. [25] 郑大材, 吕辉. 短音圈电机设计要求及使用[J]. 西北电讯工程学院学报, 1979, 6(3): 113-123. Zheng Dacai, Lü Hui.Design requirements and use of short voice coil motors[J]. Journal of Xidian University, 1979, 6(3): 113-123. [26] Lee D J, Woo K S, Park N C, et al.Design and optimization of a linear actuator for subminiature optical storage devices[J]. IEEE Transactions on Magnetics, 2005, 41(2): 1055-1057. [27] Chou P C, Lin Yucheng, Cheng S.A novel seesaw swivel actuator design and fabrication[J]. IEEE Transactions on Magnetics, 2010, 46(7): 2603-2610. [28] Djamari D W, Ong C J, Yap F F.An investigation into the use of four-bar linkage mechanism as actuator for hard-disk drive[J]. IEEE Transactions on Magnetics, 2013, 49(6): 2466-2472. [29] 周惠兴, 黄灿, 王磊, 等. 大功率动磁式音圈电机优化及试验研究[J]. 北京信息科技大学学报, 2014, 29(3): 1-4. Zhou Huixing, Huang Can, Wang Lei, et al.Opti- mization and experimental research for a high-power moving magnet voice coil motor[J]. Journal of Beijing Information Science & Technology University, 2014, 29(3): 1-4. [30] 凌金福. 动圈式直线电机的研制和应用[J]. 电工电能新技术, 1983, 2(3): 44-49. Ling Jinfu.Development and application of moving coil linear motor[J]. Advanced Technology of Electrical Engineering and Energy, 1983, 2(3): 44-49. [31] 王晓伟. 高推力密度圆筒型音圈电机的结构设计研究[D]. 重庆: 重庆大学, 2018. [32] 夏瑞阳. 圆柱形音圈电机结构的设计及优化[D]. 洛阳: 河南科技大学, 2012. [33] 陈国真, 徐斯强, 刘品宽, 等. 大行程快速反射镜的结构设计及带宽特性[J]. 光学精密工程, 2020, 28(1): 90-101. Chen Guozhen, Xu Siqiang, Liu Pinkuan, et al.Structural design and bandwidth characteristic of a fast steering mirror with large travel range[J]. Optics and Precision Engineering, 2020, 28(1): 90-101. [34] Lou Yunjiang, Yang Xiansheng, Li Ke, et al.Design and optimization of a linear voice coil motor for LED die bonders[C]//IEEE International Conference on Information and Automation, Yinchuan, China, 2013: 1011-1016. [35] Peng Bo, Quan JianZhou, Yin Zhouping, et al. The analysis and control of pick-and-place process in flip-chip[C]//International Conference on Mechanical and Electronics Engineering, Kyoto, Japan, 2010: 404-408. [36] Kim D H, Lee D Y, Jung C G, et al.Improvement of operating characteristics for MC-LOA taking account of permanent magnet arrangement[J]. IEEE Transa- ctions on Magnetics, 2004, 40(4): 2038-2040. [37] 凌金福, 李世毅, 杨媛霞. 双磁体音圈电机气隙磁场的分析[J]. 电工技术杂志, 1984, 5(6): 25-29. Ling Jinfu, Li Shiyi, Yang Yuanxia.Analysis of air gap magnetic field of dual magnet voice coil motor[J]. Electrotechnical Application, 1984, 5(6): 25-29. [38] Guo Hong, Wang Dayu, Xu Jinquan.Research on a high-frequency response direct drive valve system based on voice coil motor[J]. IEEE Transactions on Power Electronics, 2013, 28(5): 2483-2492. [39] Wu Shuai, Jiao Zongxia, Yan Liang, et al.Deve- lopment of a direct-drive servo valve with high- frequency voice coil motor and advanced digital controller[J]. IEEE/ASME Transactions on Mechatro- nics, 2014, 19(3): 932-942. [40] 凌志鹏, 李晋川, 黄学进, 等. 改进型音圈式直线电动机有限元优化设计[J]. 微电机, 2007, 40(10): 18-20. Ling Zhipeng, Li Jinchuan, Huang Xuejin, et al.Finite element optimal design of improved linear motor of voice coil type[J]. Micromotors, 2007, 40(10): 18-20. [41] 王淑红, 熊光煜. 新型筒型永磁动圈式直线电动机气隙磁场解析分析[J]. 电工技术学报, 2007, 20(5): 40-44. Wang Shuhong, Xiong Guangyu.Analysis of air-gap field in a new tubular linear PM motor with moving coil[J]. Transactions of China Electrotechnical Society, 2007, 20(5): 40-44. [42] Lu Haiwei, Zhu Jianguo, Lin Zhiwei, et al.A miniature short stroke linear actuator-design and analysis[J]. IEEE Transactions on Magnetics, 2008, 44(4): 497-504. [43] Shinshi T, Shimizu D, Kodeki K, et al.A fast steering mirror driven by voice coil motors and supported by magnetic suspension[C]//International Conference on Mechatronics Technology, Salerno, Italy, 2019: 1-4. [44] Meessen K J, Gysen B L J, Paulides J J H, et al. Halbach permanent magnet shape selection for slotless tubular actuators[J]. IEEE Transactions on Magnetics, 2008, 44(11): 4305-4308. [45] Remy M, Lemarquand G, Castagnede B, et al.Ironless and leakage free voice-coil motor made of bonded magnets[J]. IEEE Transactions on Magnetics, 2008, 44(11): 4289-4292. [46] Li Liyi, Huang Xuzhen, Pan Donghua, et al.Magnetic field of a tubular linear motor with special permanent magnet[J]. IEEE Transactions on Plasma Science, 2011, 39(1): 83-86. [47] 石本义, 陈四海, 吴鑫, 等. 基于遗传算法的音圈电机的优化设计[C]//先进光学技术及其应用研讨会论文集, 杭州, 中国, 2009: 137-141. [48] Yu Bin, Fu Hongwei, Wang Li.Electromagnetic field analysis and calculation of voice coil motor with a concentrated magnetic structure[C]//International Conference on Electrical Machines and Systems, Harbin, China, 2019: 1-4. [49] Lemarquand V, Ravaud R, Lemarquand G.A new linear voice-coil motor for ironless loudspeakers: analytical study[C]//International Conference on Electrical Machines, Rome, Italy, 2010: 1-5. [50] Xu Zhaoping, Chang Siqin.Improved moving coil electric machine for internal combustion linear generator[J]. IEEE Transactions on Energy Con- version, 2010, 25(2): 281-286. [51] Li Liyi, Pan Donghua, Tang Yongbin, et al.Analysis of flat voice coil motor for precision positioning system[C]//International Conference on Electrical Machines and Systems, Beijing, China, 2011: 1-4. [52] Wu Shuai, Jiao Zongxia, Yan Liang, et al.Deve- lopment of a direct-drive servo valve with high- frequency voice coil motor and advanced digital controller[J]. IEEE/ASME Transactions on Mechatronics, 2014, 19(3): 932-942. [53] Dong Liang, Chen Jinhua, Zhang Chi, et al.A novel voice coil motor used in nano-positioning device[C]// International Conference on Electrical Machines and Systems, Pattaya, Thailand, 2015: 1997-2002. [54] Dong Liang, Chen Jinhua, Zhang Chi, et al.Design and comparison of three-type VCMs for nano- positioning system[C]//IEEE 11th Conference on Industrial Electronics and Applications, Hefei, China, 2016: 656-1660. [55] Yan Liang, Zhang Lei, Jiao Zongxia, et al.Armature reaction field and inductance of coreless moving-coil tubular linear machine[J]. IEEE Transactions on Industrial Electronics, 2014, 61(12): 6956-6965. [56] Yu Bin, Fu Hongwei, Wang Li.Electromagnetic field analysis and calculation of voice coil motor with a concentrated magnetic structure[C]//International Conference on Electrical Machines and Systems, Harbin, China, 2019: 1-4. [57] Luo Ciyong, Sun Jun, Liao Yong, et al.Analysis and design of ironless toroidal winding of tubular linear voice coil motor for minimum copper loss[J]. IEEE Transactions on Plasma Science, 2019, 47(5): 2369-2375. [58] Sanada M, Morimoto S.Experimental verification of thrust improvement in voice coil linear actuator using combined wire of copper and iron[C]//IEEE Industry Applications Annual Meeting, New Orlearns, USA, 2007: 490-494. [59] Cakal G, Zeinali R, Keysan O.Design and optimi- zation of reduced torque ripple rotary voice coil motor[C]//International Conference on Electrical Machines, Alexandroupoli, Greece, 2018: 663-669. [60] Guo Hong, Wang Dayu, Xu Jinquan.Research on a high-frequency response direct drive valve system based on voice coil motor[J]. IEEE Transactions on Power Electronics, 2013, 28(5): 2483-2492. [61] 林兼. 音圈电机的型式和性能[J]. 电子计算机动态, 1978(7): 62-68. Lin Jian.Type and performance of voice coil motor[J]. Journal of Computer Research and Deve- lopment, 1978(7): 62-68. [62] Chi Feng, Wu Liwei, Yang Xiaofeng.Optimum design of voice coil motor using for nano-stage in lithographic equipment[C]//Proceeding of the 11th World Congress on Intelligent Control and Auto- mation, Shenyang, China, 2014: 2540-2543. [63] Kim C, Kim Y.Design and analysis of linear voice coil motor for automatic transmission[C]//International Conference on Electrical Machines and Systems, Chiba, Japan, 2016: 1-5. [64] Liu Yu, Zhang Ming, Zhu Yu, et al.Optimization of voice coil motor to enhance dynamic response based on an improved magnetic equivalent circuit model[J]. IEEE Transactions on Magnetics, 2011, 47(9): 2247-2251. [65] Smith K J, Graham D J, Neasham J A.Design and optimization of a voice coil motor with a rotary actuator for an ultrasound scanner[J]. IEEE Transa- ctions on Industrial Electronics, 2015, 62(11): 7073-7078. [66] 张弛, 汤廷孝, 邓益民. 设计辅助齿抑制永磁同步直线电机端部效应[J]. 机械制造, 2018, 56(11): 45-49. Zhang Chi, Tang Tingxiao, Deng Yimin.Design auxiliary teeth to suppress the end effect of permanent magnet synchronous linear motor[J]. Machinery, 2018, 56(11): 45-49. [67] Lee S G, Kim S A, Saha S, et al.Optimal structure design for minimizing detent force of PMLSM for a ropeless elevator[J]. IEEE Transactions on Magnetics, 2014, 50(1): 1-4. [68] Kim Y, Sohn B, Youm W, et al.Voice coil motor nano stage with an eddy current damper[C]// International Conference on Control, Automation, Robotics and Vision, Hanoi, Vietnam, 2008: 1714-1717. [69] Luo Ciyong, Sun Jun, Wang Xiaowei, et al.Design of voice coil motor with the forward winding for linear vibro-impact systems[J]. IEEE Transactions on Magnetics, 2017, 53(8): 1-9. [70] Luo Ciyong, Lin Zhonglan, Sun Jun.Design of linear voice coil motor with semi-closed structure[J]. IET Electric Power Applications, 2019, 13(10): 1574-1579. [71] Luo Ciyong, Li Xingwang, Liao Yong, et al.Design of end-iron-free voice coil motor with appropriate PM length ratio[J]. IEEE Transactions on Energy Conversion, 2020, 35(2): 1139-1146. [72] Jun H W, Seol H S, Lee J.Effect of pole-slot combination on eddy-current formation in PMSM rotor assembly including retaining plate structure[J]. IEEE Transactions on Magnetics, 2017, 53(11): 1-5. [73] Jun H W, Lee J, Lee H W, et al.Study on the optimal rotor retaining sleeve structure for the reduction of eddy-current loss in high-speed SPMSM[J]. IEEE Transactions on Magnetics, 2015, 51(3): 1-4. [74] Luo Ciyong, Zhao Rui.Analysis and restraining of eddy current damping effect in linear voice coil motor[J]. IET Electric Power Applications, 2019, 14(5): 837-842. [75] Zhang Zijiao, Zhou Haibo, Duan Jian, et al.Design and analysis of two-degree-of-freedom voice coil motors for linear-rotary motion[C]//International Conference on Electrical Machines and Systems, Chiba, Japan, 2016: 1-6. [76] Luo Meizhu, Zhou Haibo, Duan Jian, et al.Design and analysis of a servo control system for a novel linear-rotary voice coil motor[C]//International Con- ference on Electrical Machines and Systems, Chiba, Japan, 2016: 13-16. [77] Zhang Zijiao, Zhou Haibo, Duan Jian.Design and analysis of a high acceleration rotary-linear voice coil motor[J]. IEEE Transactions on Magnetics, 2017, 53(7): 1-9. [78] Zhang Zijiao, Luo Meizhu, Zhou Haibo, et al.Design and analysis of a novel two-degree-of-freedom voice coil motor[J]. IEEE/ASME Transactions on Mechatronics, 2019, 24(6): 2908-2918. [79] Luo Meizhu, Zhang Zijiao, Luo Chaoqun.Analysis and optimization on armature reaction of a rotary- linear voice coil motor[C]//International Conference on Electrical Machines and Systems, Harbin, China, 2019: 1-4. [80] Liu C S, Ko S S, Lin P D.Experimental characteri- zation of high-performance miniature auto-focusing VCM actuator[J]. IEEE Transactions on Magnetics, 2011, 47(4): 738-745. [81] Lai L K, Tsai C L, Liu T S.Design of compact linear electromagnetic actuator for auto-focusing in phone camera[J]. IEEE Transactions on Magnetics, 2011, 47(12): 4740-4744. [82] Hsieh C L, Liu C S.Design of a voice coil motor actuator with l-shape coils for optical zooming smartphone cameras[J]. IEEE Access, 2020, 8: 20884-20891. [83] Jeong J, Jo J, Park K.Characteristic analysis and improvement of VCM/PZT driven xy nanostage for atomic force microscope[C]//International Conference on Control, Automation and Systems, Gwangju, South Korea, 2013: 1381-1383. [84] Bang Y B, Lee C H, Cho S Y, et al.Design of a high-speed, short-stroke xy-stage with counter- balance mechanisms[C]//International Conference on Control, Automation and Systems, Busan, South Korea, 2015: 123-125.
2021, Vol. 36 
