Abstract：Along with the rapid development of large scale integrated circuits, wireless sensor networks and the farther research on micro electro mechanical system (MEMS) technology, MEMS-based micro power has wide application prospects. As a branch of micro power supply, micro electromagnetic vibration energy harvester can convert vibration energy prevalent in the environment into electrical energy, which can be used as a long-term effective supply for the sensor devices. The physical model and working principles of vibration energy harvester is simply described. The vibration characteristics of the harvester under sinusoidal excitation are studied. The vibration form and natural frequencies of the harvesters’ structure are analyzed, and structural optimization is proposed by means of the finite element method. A composite structure of vibration energy harvester is presented; the output efficiency is greatly improved compared to traditional single magnet structure.
[1] 唐彬, 温志渝, 温中泉. 振动式微型发电机的研究现状与发展趋势[J]. 微纳电子技术, 2007(5)： 254-259. Tang Bin, Wen Zhiyu, When Zhongquan. Current R&D of the micro vibration-based generator[J]. Micronanoelectronic Technology, 2007(5): 254-259. [2] Williams C B, Yates R B. Analysis of a micro-electric generator for microsystems[J]. Sensors and Actuators A, 1996, 52(3): 8-11. [3] 王佩红, 戴旭涵, 赵小林. 微型电磁式振动能量采集器的研究进展[J]. 振动与冲击, 2007, 9(26): 94-98. Wang Peihong, Dai Xuhan, Zhao Xiaolin. A survey of micro electromagnetic vibration energy harvesters [J]. Journal of Vibration and Shock, 2007, 9(26): 94-98. [4] Beeby S P, Tudor M J, Torah R N. Experimental comparison of macro and micro scale electro- magnetic vibration powered generators [J]. Microsystems Technology, 2007, 13(3): 1647-1653. [5] Williams C B, Shearwood C, Harradine M A, et al. Development of an electromagnetic micro-generator [J]. IEE Proceedings Circuits Devices System, 2001, 148(6): 337-342. [6] 方同, 振动理论及应用[M]. 西安: 西安工业大学出版社, 1998. [7] Mitcheson P D, Green T C, Yeatman E M, et al. Archi-tectures for vibration-driven micro-power generators[J]. Journal Microelectromechanical, 2004, 13(3): 429-440. [8] James E P, Tudor M J, Beeby S P, et al. An investigation of self-powered systems for condition monitoring application [J]. Sensors and Actuators A, 2004, 110(3): 171-176. [9] Roundy S, Otis B P, Chee Y H, et al. A 1.9 GHz RF transmit beacon using environmentally scavenged energy[C]. Proceedings of the International Symposium on Low-Power Electronic Design, 2003, 5(1): 25-27. [10] Meninger S, Mur-Miranda J O, Amirtharajah R, et al. Vibration-to-electric energy conversion [J]. IEEE Transactions on VLSI Systems, 2001, 9(1): 64-76. [11] Roundy S, Wright P K, Rabaey J. A study of low level vibrations as a power source for wireless sensor nodes [J]. Computer Communications, 2003, 26(11): 1131- 1144. [12] Jones P G, Tudor M J, Beeby S P, et al. An el- electromagnetic vibration-powered generator for intelligent sensor systems[J]. Sensors and Actuators, 2004, 10(3): 344-349. [13] 姜政, 丁桂甫, 王艳. 扭梁悬臂梁支撑的扭摆式MEMS永磁双稳态机构[J]. 半导体学报, 2006, 27(1): 143-149. Jiang Zheng, Ding Guifu, Wang Yan. A teeterboard pattern MEMS permanent magnet bitable structure supported by torsion and cantilever beam[J]. Chinese Journal of Semiconductors, 2006, 27(1):143-149. [14] Wang Ye, Li Zhizhong, Mc Cormick D T, et al. A micro machined RF micro relay with electro-thermal actuation[J]. Sensors and Actuators A, 2003, 103(1): 231-235. [15] 曹辉. 永磁体产生强磁场的研究[J]. 沈阳工业大学学报, 2003, 25(4): 291-293. Cao Hui. Research on production of intense permanent field[J]. Journal of Shenyang University of Technology, 2003, 25(4): 291-293.
2012, Vol. 27 
