Transactions of China Electrotechnical Society  2022, Vol. 37 Issue (11): 2725-2732    DOI: 10.19595/j.cnki.1000-6753.tces.210607
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Experimental Study on the Influence of Inductively Coupled Plasma Operating Parameters on Coating Quality
Zhan Zhihua1,2, Wang Chunhua1, Zhou Qiujiao3, Liu Chengzhou2, Zhao Peng2
1. Faculty of Physics Hefei University of Technology Hefei 230601 China;
2. Institute of Plasma Physics Hefei Institutes of Physical Science Chinese Academy of Sciences Hefei 230031 China;
3. Shenzhen Institute of Advanced Technology Chinese Academy of Sciences Shenzhen 440305 China

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