1. Institute of Marine Engineering Dalian Maritime University Dalian 116026 China; 2. Department of Physics Dalian Maritime University Dalian 116026 China
Abstract An insulating dielectric layer is the essential component of oxygen plasma reactor. High performance dielectric materials ensure that the oxygen plasma reactor could work efficiently and stably. In this paper, the characteristics of alumina dielectric are investigated before and after aging. The surface of α-Al2O3 dielectric layer is smooth even has no defects, the relative permittivity is about 9.79. Its higher volume resistivity and lower loss factor help to improve the efficiency of oxygen plasma reactor. After working 50 hours, the substrate, relative permittivity and volume resistivity of α-Al2O3 dielectric layer are unchanged. But some substances from the sputtering of stainless steel electrodes are on the surface of dielectric layer, which reduce the surface resistivity. The results are meaningful for the optimization of oxygen plasma reactor.
Xu Shujing,Li Rihong,Yu Zhe等. Characteristics of Alumina Dielectric Used for Oxygen Plasma Reactor[J]. Transactions of China Electrotechnical Society, 2017, 32(8): 74-81.
[1] Bai Mindong, Zhang Zhitao, Zhang Nahui, et al. Treatment of 250t/h ballast water in oceanic ships using ·OH radicals based on strong electric-field discharge[J]. Plasma Chemistry and Plasma Pro- cessing, 2012, 32(4): 693-702. [2] Zhang Yubo, Bai Mindong, Chen Cao, et al. ·OH treatment for killing of harmful organisms in ship’s ballast water with medium salinity based on strong ionization discharge[J]. Plasma Chemistry and Plasma Processing, 2013, 33(4): 751-763. [3] Tian Yiping, Yuan Xiaoli, Xu Shujing, et al. Biological efficacy and toxic effect of emergency water disinfection process based on advanced oxidation technology[J]. Ecotoxicology, 2015, 24(10): 2141-2150. [4] 李芳, 白敏冬, 洪伟辰, 等. 羟基自由基快速致死水华针杆藻的研究[J]. 环境科学学报, 2016, 36(2): 550-556. Li Fang, Bai Mindong, Hong Weichen, et al. Effect of hydroxyl radicals on the removal of Synedra sp. in water blooms[J]. Acta Scientiae Circumstantiae, 2016, 36(2): 550-556. [5] Bai Mindi, Zhang Zhitao, Bai Mindong. Simu- ltaneous desulfurization and denitrification of flue gas by ·OH radicals produced from O 2 + and water vapor in a duct[J]. Environmental Science & Techno- logy, 2012, 46(18): 10161-10168. [6] 张晓星, 肖焓艳, 黄杨珏. 低温等离子体处理SF 6 废气综述[J]. 电工技术学报, 2016, 31(24): 16-24. Zhang Xiaoxing, Xiao Hanyan, Huang Yangjue. A review of degradation of SF 6 waste by low temper- ature plasma[J]. Transactions of China Electro- technical Society, 2016, 31(24): 16-24. [7] 张凯, 王瑞雪, 韩伟, 等. 等离子体重油加工技术研究进展[J]. 电工技术学报, 2016, 31(24): 1-15. Zhang Kai, Wang Ruixue, Han Wei, et al. Progress of heavy oil processing by plasma technology[J]. Transactions of China Electrotechnical Society, 2016, 31(24): 1-15. [8] 唐雄民, 王翠, 彭永进. 介质阻挡放电型臭氧发生器的一种等效模型[J]. 电工技术学报, 2009, 24(5): 220-224. Tang Xiongmin, Wang Cui, Peng Yongjin. An equivalent model of dielectric-barrier discharge type ozonizer[J]. Transactions of China Electrotechnical Society, 2009, 24(5): 220-224. [9] 王新新. 介质阻挡放电及其应用[J]. 高电压技术, 2009, 35(1): 1-11. Wang Xinxin. Dielectric barrier discharge and its applications[J]. High Voltage Engineering, 2009, 35(1): 1-11. [10] 杨春, 胡兆吉, 魏林生. 放电等离子体臭氧发生技术研究现状与进展[J]. 高压电器, 2010, 46(9): 78-85. Yang Chun, Hu Zhaoji, Wei Linsheng. The research development of plasma discharge synthesis techno- logy of ozone[J]. High Voltage Apparatus, 2010, 46(9): 78-85. [11] 徐学基, 诸定昌. 气体放电物理[M]. 1版. 上海: 复旦大学出版社, 1996. [12] Kogelschatz U. Dielectric-barrier discharges: their history, discharge physics, and industrial appli- cations[J]. Plasma Chemistry and Plasma Processing, 2003, 23(1): 1-46. [13] Li Ruixing, Tang Qing, Yin Shu, et al. Investigation of dielectric barrier discharge dependence on permittivity of barrier materials[J]. Applied Physics Letters, 2007, 90(13): 131502(3). [14] 周立福, 杨学昌, 陈波, 等. 臭氧发生器用高介电硅橡胶复合材料特性及试验分析[J]. 高电压技术, 2010, 36(5): 1258-1263. Zhou Lifu, Yang Xuechang, Chen Bo, et al. Charac- teristics and experimental analysis of high-KMVQ functional composites for ozonizer[J]. High Voltage Engineering, 2010, 36(5): 1258-1263. [15] 魏旭, 刘虹, 解之凤, 等. 提高臭氧发生器放电室效率的研究[J]. 电工电能新技术, 1998, 17(2): 46-50. Wei Xu, Liu Hong, Xie Zhifeng, et al. Research on improving efficiency of discharge cell of ozone generators[J]. Advanced Technology of Electrical Engineering and Energy, 1998, 17(2): 46-50. [16] Zhang Zhitao, Bai Xiyao, Bai Mindong, et al. An ozone generator of miniaturization and modu- larization with the narrow discharge gap[J]. Plasma Chemistry and Plasma Processing, 2003, 23(3): 559- 568. [17] 刘维良, 吴坚强, 陈云霞, 等. 臭氧发生器用Al 2 O 3 陶瓷基板材料的改性研究[J]. 陶瓷学报, 2001, 22(2): 73-77. Liu Weiliang, Wu Jianqiang, Chen Yunxia, et al. Study on the Al 2 O 3 ceramic plate material modifier for ozonizer[J]. Journal of Ceramics, 2001, 22(2): 73-77.
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