氧等离子体反应器中氧化铝电介质特性

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Abstract An insulating dielectric layer is the essential component of oxygen plasma reactor. High performance dielectric materials ensure that the oxygen plasma reactor could work efficiently and stably. In this paper, the characteristics of alumina dielectric are investigated before and after aging. The surface of α-Al₂O₃ dielectric layer is smooth even has no defects, the relative permittivity is about 9.79. Its higher volume resistivity and lower loss factor help to improve the efficiency of oxygen plasma reactor. After working 50 hours, the substrate, relative permittivity and volume resistivity of α-Al₂O₃ dielectric layer are unchanged. But some substances from the sputtering of stainless steel electrodes are on the surface of dielectric layer, which reduce the surface resistivity. The results are meaningful for the optimization of oxygen plasma reactor.

Key words： Dielectric barrier discharge, dielectric, reactive oxygen species, alumina ceramics

Received: 23 June 2016 Published: 02 May 2017

PACS:

O539

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	Articles by authors
	Xu Shujing
	Li Rihong
	Yu Zhe
	Tian Yiping
	Zhang Zhitao

Cite this article:

Xu Shujing,Li Rihong,Yu Zhe等. Characteristics of Alumina Dielectric Used for Oxygen Plasma Reactor[J]. Transactions of China Electrotechnical Society, 2017, 32(8): 74-81.

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https://dgjsxb.ces-transaction.com/EN/ OR https://dgjsxb.ces-transaction.com/EN/Y2017/V32/I8/74

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