Research on Flexible and Superhydrophobic Temperature Sensor Based on Laser-Induced Graphene
Yang Li1,2,3,4, Chen Xue2,3,5, Wang Zihan2,6, Gao Peng2,7, Xu Guizhi2,3,5
1. Department of Health Sciences and Biomedical Engineering Hebei University of Technology Tianjin 300130 China; 2. State Key Laboratory of Reliability and Intelligence of Electrical Equipment Hebei University of Technology Tianjin 300130 China; 3. Hebei Key Laboratory of Bioelectromagnetics and Neuroengineering Hebei University of Technology Tianjin 300130 China; 4. Tianzhong Yimai Technology Development Co. Ltd Tianjin 300392 China; 5. Department of Electrical Engineering Hebei University of Technology Tianjin 300130 China; 6. Department of Mechanical Engineering Hebei University of Technology Tianjin 300130 China; 7. Department of Electronic Information Hebei University of Technology Tianjin 300130 China
Abstract：Body temperature is a crucial indicator of human health, and flexible temperature sensors can achieve long-term, remote, and real-time temperature monitoring, which is of great significance for bedside monitoring and early warning of diseases in elderly households. However, the development of most temperature monitoring devices is limited by their high rigidity, large volume, cumbersome preparation process, uncomfortable wearing, and low linearity. To address these issues, this paper proposes a high-precision assembly method for a flexible and superhydrophobic temperature sensor based on patterned laser-induced graphene (LIG). The temperature sensor can be portable integrated into masks and band-aids to achieve the monitoring of breathing frequency and skin temperature in various parts of the body. Firstly, the sensor is designed as a curved snake-shaped structure to ensure a large area of sensing in relative space, while also providing good resistance to bending deformation. It can be conformal attached to the human skin, allowing the sensor to adjust to the body's dynamic curve changes. Secondly, a facile and scalable laser direct writing process is used to prepare a 3D porous graphene foam from the carbon-containing polyimide (PI) film, and the high-performance flexible temperature sensor is obtained through the adjustment of the laser parameter. Finally, immersing the sensor into hydrophobic silica (Hf-SiO2) suspension and dried to obtain a flexible and superhydrophobic temperature sensor with moisture resistance. The one-step prepared temperature sensor is small and light (30 mm×5.5 mm×0.06 mm), which guarantees wearable comfort. The micro-appearance characteristics of the LIG flexible temperature sensor show a large number of three-dimensional stacking discharge micron/nano-porous structures, which are the result of numerous gas products released during the process of laser rapid light and thermal effects. The performance test results show that the temperature sensor has good stability, repetitiveness, and linearity within a detection range of 25~75℃. The sensitivity curve shows the negative temperature coefficient (TCR=-6.534×10-4/℃) and high goodness of fit of 0.991 84. The small-range test close to the skin temperature of the sensor shows a resolution of the 0.1℃. In addition, research on the influence of external factors on the temperature performance of sensors shows that wearable temperature sensors have good bending capacity, and the use of Hf-SiO2 packaging layer can effectively isolate the high humidity in the environment without sacrificing temperature sensing performance. Finally, the temperature sensor shows the real-time monitoring ability of the human body's breathing frequency and the changes in human body temperature in the actual application demonstration. The following conclusions can be obtained through experimental data analysis: (1) Laser direct-writing technology can make a flexible temperature sensor with arbitrary shapes in one step in one step. The small serpentine-shaped structure design effectively improves the bending change and wearable comfort. (2) LIG flexible sensors have high sensitivity, wide detection range, high accuracy, and good stability over a wide temperature range. (3) The introduction of the Hf-SiO2 packaging layer effectively isolates the impact of high humidity of the environment, while not sacrificing the temperature sensing performance. (4) With adhesive, the sensor can be portable integrated with masks and band-aids to achieve real-time monitoring of respiratory rate and body temperature.
杨丽, 陈雪, 王子涵, 高鹏, 徐桂芝. 基于激光诱导石墨烯的柔性超疏水温度传感器研究[J]. 电工技术学报, 2023, 38(zk1): 257-266.
Yang Li, Chen Xue, Wang Zihan, Gao Peng, Xu Guizhi. Research on Flexible and Superhydrophobic Temperature Sensor Based on Laser-Induced Graphene. Transactions of China Electrotechnical Society, 2023, 38(zk1): 257-266.
[1] Dell'Isola G B, Cosentini E, Canale L, et al. Noncontact body temperature measurement: uncertainty evaluation and screening decision rule to prevent the spread of COVID-19[J]. Sensors, 2021, 21(2): 346. [2] Montagna W.The structure and function of skin[M]. Amsterdam: Elsevier, 2012. [3] Chen Zetong, Zhao Danna, Ma Rui, et al.Flexible temperature sensors based on carbon nanomaterials[J]. Journal of Materials Chemistry B, 2021, 9(8): 1941-1964. [4] Jiang Niu, Chang Xiaohua, Hu Dengwen, et al.Flexible, transparent, and antibacterial ionogels toward highly sensitive strain and temperature sensors[J]. Chemical Engineering Journal, 2021, 424: 130418. [5] Wei Shi, Qiu Xiaoyan, An Jiaqi, et al.Highly sensitive, flexible, green synthesized graphene/biomass aerogels for pressure sensing application[J]. Composites Science and Technology, 2021, 207: 108730. [6] Kumar V H, Sindhu S.Two-dimensional transparent Ag/Al metal temperature sensor[J]. Bulletin of Materials Science, 2021, 44(2): 146. [7] 张国治, 胡栩焜, 邓广宇, 等. SF6及SF6故障分解气体与局部放电柔性特高频天线传感器基底相容性实验研究[J].电工技术学报, 2023, 38(15): 4050-4062. Zhang Guozhi, Hu Xukun, Deng Guangyu, et al.Experimental study on substrate compatibility of SF6 and SF6 fault-decomposing gases with partial discharge flexible UHF antenna sensors[J/OL]. Transactions of China Electrotechnical Society, 2023, 38(15): 4050-4062. [8] 张国治, 韩景琦, 刘健犇, 等. GIS局部放电检测天线本体和巴伦共面柔性小型化特高频天线传感器研究[J]. 电工技术学报, 2023, 38(4): 1064-1075. Zhang Guozhi, Han Jingqi, Liu Jianben, et al.Research on flexible miniaturized UHF antenna sensor with coplanar antenna body and balun for GIS partial discharge detection[J]. Transactions of China Electrotechnical Society, 2023, 38(4): 1064-1075. [9] Liu Jihang, Zhao Zhan, Fang Zhen, et al.High-performance FBAR humidity sensor based on the PI film as the multifunctional layer[J]. Sensors and Actuators B: Chemical, 2020, 308: 127694. [10] Jia Lingpu, Zhou Yaxin, Wu Kaipeng, et al.Acetylcholinesterase modified AuNPs-MoS2-rGO/PI flexible film biosensor: towards efficient fabrication and application in paraoxon detection[J]. Bioelectrochemistry, 2020, 131: 107392. [11] Liu Yibin, Gu Huimin, Jia Yu, et al.Design and preparation of biomimetic polydimethylsiloxane (PDMS) films with superhydrophobic, self-healing and drag reduction properties via replication of shark skin and SI-ATRP[J]. Chemical Engineering Journal, 2019, 356: 318-328. [12] Chen Jianwen, Zhu Yutian, Jiang Wei.A stretchable and transparent strain sensor based on sandwich-like PDMS/CNTs/PDMS composite containing an ultrathin conductive CNT layer[J]. Composites Science and Technology, 2020, 186: 107938. [13] Geneva I I, Cuzzo B, Fazili T, et al. Normal body temperature: a systematic review[J]. Open Forum Infectious Diseases, 2019, 6(4): ofz032. [14] Su Yi, Ma Chunsheng, Chen Jing, et al.Printable, highly sensitive flexible temperature sensors for human body temperature monitoring: a review[J]. Nanoscale Research Letters, 2020, 15(1): 200. [15] Harris P J F. Carbon nanotube composites[J]. International Materials Reviews, 2004, 49(1): 31-43. [16] Schroeder V, Savagatrup S, He M, et al.Carbon nanotube chemical sensors[J]. Chemical Reviews, 2019, 119(1): 599-663. [17] Ye Ruquan, James D K, Tour J M.Laser-induced graphene: from discovery to translation[J]. Advanced Materials, 2019, 31(1): 1803621. [18] Nag A, Mitra A, Mukhopadhyay S C.Graphene and its sensor-based applications: a review[J]. Sensors and Actuators A: Physical, 2018, 270: 177-194. [19] 庞思远, 刘希喆. 石墨烯在电气领域的研究与应用综述[J]. 电工技术学报, 2018, 33(8): 1705-1722. Pang Siyuan, Liu Xizhe.Review on research and application of graphene in electrical field[J]. Transactions of China Electrotechnical Society, 2018, 33(8): 1705-1722. [20] 张宏亮, 金海, 张丝钰, 等. 纳米氧化石墨烯/环氧树脂复合材料的电极极化现象[J]. 电工技术学报, 2018, 33(23): 5591-5599. Zhang Hongliang, Jin Hai, Zhang Siyu, et al.Electrode polarization in graphene oxide/epoxy resins nanocomposites[J]. Transactions of China Electrotechnical Society, 2018, 33(23): 5591-5599. [21] 高新, 李志慧, 刘宇鹏, 等. 改性石墨烯基传感器对SF6分解组分H2S的吸附机理及检测特性研究[J].电工技术学报, 2023, 38(13): 3606-3618. Gao Xin, Li Zhihui, Liu Yupeng, et al.Study on adsorption mechanism and detection characteristics of modified graphene sensors for SF6 decomposed component H2S[J]. Transactions of China Electrotechnical Society, 2023, 38(13): 3606-3618. [22] 桂银刚, 许文龙, 张晓星, 等. TiO2掺杂石墨烯对SO2气体的气敏特性研究[J]. 电工技术学报, 2021, 36(21): 4590-4597. Gui Yingang, Xu Wenlong, Zhang Xiaoxing, et al.Adsorption property of SO2 gas on TiO2-doped graphene[J]. Transactions of China Electrotechnical Society, 2021, 36(21): 4590-4597. [23] Turkani V S, Maddipatla D, Narakathu B B, et al.A carbon nanotube based NTC thermistor using additive print manufacturing processes[J]. Sensors and Actuators A: Physical, 2018, 279: 1-9. [24] Sarma S, Lee J.Developing efficient thin film temperature sensors utilizing layered carbon nanotube films[J]. Sensors, 2018, 18(10): 3182. [25] Chen Xue, Li Runze, Niu Guangyu, et al.Porous graphene foam composite-based dual-mode sensors for underwater temperature and subtle motion detection[J]. Chemical Engineering Journal, 2022, 444: 136631. [26] Yang Li, Yi Ning, Zhu Jia, et al.Novel gas sensing platform based on a stretchable laser-induced graphene pattern with self-heating capabilities[J]. Journal of Materials Chemistry A, 2020, 8(14): 6487-6500. [27] Yang Li, Zheng Guanghao, Cao Yaoqian, et al.Moisture-resistant, stretchable NOx gas sensors based on laser-induced graphene for environmental monitoring and breath analysis[J]. Microsystems & Nanoengineering, 2022, 8: 78. [28] Yang Li, Ji Huadong, Meng Chuizhou, et al.Intrinsically breathable and flexible NO2 gas sensors produced by laser direct writing of self-assembled block copolymers[J]. ACS Applied Materials & Interfaces, 2022, 14(15): 17818-17825. [29] Chen Xue, Hou Zhanrui, Li Guoxian, et al.A laser-scribed wearable strain sensing system powered by an integrated rechargeable thin-film zinc-air battery for a long-time continuous healthcare monitoring[J]. Nano Energy, 2022, 101: 107606. [30] Wang Xiandi, Dong Lin, Zhang Hanlu, et al.Recent progress in electronic skin[J]. Advanced Science, 2015, 2(10): 1500169. [31] Wang Lili, Chen Di, Jiang Kai, et al.New insights and perspectives into biological materials for flexible electronics[J]. Chemical Society Reviews, 2017, 46(22): 6764-6815. [32] Di Giacomo R, Bonanomi L, Costanza V, et al. Biomimetic temperature-sensing layer for artificial skins[J]. Science Robotics, 2017, 2(3): eaai9251. [33] Yang Yiran, Song Yu, Bo Xiangjie, et al.A laser-engraved wearable sensor for sensitive detection of uric acid and tyrosine in sweat[J]. Nature Biotechnology, 2020, 38(2): 217-224. [34] Li Qianming, Liu Hu, Zhang Shuaidi, et al.Superhydrophobic electrically conductive paper for ultrasensitive strain sensor with excellent anticorrosion and self-cleaning property[J]. ACS Applied Materials & Interfaces, 2019, 11(24): 21904-21914.
2023, Vol. 38 
