Abstract：The volume miniaturization and functional diversification of electronic products have brought great challenges to its voltage regulator modules that power various internal chips. Power supply on chip (PwrSoC) system has a broad application prospect in this aspect, and the key to promote its further development and promotion application is the breakthrough of thin-film magnetic micro-inductor technology for processing high-frequency power. The research status at home and abroad of thin film micro-inductor technology is mainly introduced and analyzed, including magnetic thin film materials, processing technology and inductor structure. Furthermore, it is pointed out that reasonable selection and proper optimization of different technical solutions included in the above three basic elements according to actual working conditions is the key to the design and fabrication of thin film magnetic micro-inductor with excellent performance. Finally, the development trends of thin film magnetic micro-inductor technology are prospected.
陈为, 杨仕军. 片上电源用高频薄膜磁微电感研究与发展[J]. 电工技术学报, 2019, 34(24): 5151-5165.
Chen Wei, Yang Shijun. Research and Development of High Frequency Thin Film Magnetic Micro-Inductor in Power Supply on Chip. Transactions of China Electrotechnical Society, 2019, 34(24): 5151-5165.
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2019, Vol. 34 
