Abstract：According to the control demands of plasma load, a constant current source control strategy for DC-DC converter to reduce the influence of load disturbance on precise control of current source is proposed, which is based on output voltage feedforward. Firstly, with the open loop transfer matrix of constant current source, the influence mechanism of output admittance on the load disturbance is discussed. Then, the output voltage feedforward based on plasma load equivalent circuit model and the small signal model of converter is introduced to the current loop. The output voltage feedforward compensation function is introduced to reduce the output admittance, and the influence on feedforward functions of plasma equivalent load model parameters is analyzed. Comparisons between the control with and without voltage feedforward compensation are presented. The simulation and experimental results show that, the proposed control strategy not only effectively restrains the influence of load disturbance on constant current source, but also improves the system dynamic response, and has a good effect in improving the film quality.
陈桂涛, 刘春强, 孙强, 钟彦儒, 尹忠刚. 基于前馈控制的等离子体电源恒流控制策略[J]. 电工技术学报, 2014, 29(8): 187-195.
Chen Guitao, Liu Chunqiang, Sun Qiang, Zhong Yanru, Yin Zhonggang. A Current Control Strategy Based on Feedforward Control for Plasma. Transactions of China Electrotechnical Society, 2014, 29(8): 187-195.
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