一种大力矩大位移微纳压电致动器的瞬态响应

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Abstract According to the principle of triangulation amplification and the application method of piezoelectric stack, this paper designs and makes out a kind of actuator, having high precision, high torque and large displacement. In this paper, the actuator’s static and dynamic characteristics are analyzed. The ANSYS, Matlab software and dynamic fringe projection method are used to analyze and test the actuator’s transient response characteristic from theory and actual measurement, when apply and remove the voltage. The real test result coincides with the theory analysis. When the voltage is applied, the piezoelectric actuator owns quick response speed and high voltage-displacement linearity. When the voltage is removed, the piezoelectric actuator owns smooth and steady response characteristic. It provides a basis for the actuator’s widely application, and its application prospect as a reliable and fast large displacement and high torque component in micro control system.

Key words： Piezoelectric stack displacement amplification actuator transient response character- ristic

Received: 20 August 2014 Published: 14 April 2015

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TM35

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	Articles by authors
	Jin Hong
	Hu Minqiang
	Xu Zhike
	Pan Feifei

Cite this article:

Jin Hong,Hu Minqiang,Xu Zhike等. Transient Response Characteristic of High Torque and Large Displacement Micro-/Nano Piezoelectric Actuator[J]. Transactions of China Electrotechnical Society, 2015, 30(2): 128-133.

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http://dgjsxb.ces-transaction.com/EN/ OR http://dgjsxb.ces-transaction.com/EN/Y2015/V30/I2/128

[1] Li Cheng, Zhang Chengjin, Guilin Zhang. High-speed and Large-range scanning control of a piezoelectric stack actuated platform[C]. Proceedings of the 8th World Congress on Intelligent Control and Automation, Jinan, China, 2010: 5523-5527.
[2] Li Yangmin, Xu Qingsong. Development and assess- ment of a novel decoupled xy parallel microposi- tioning platform[J]. IEEE/ASME Transactions on Mechatronics, 2010, 15(1): 125-135.
[3] 孙宝玉. 柔性压电式微位移机构动态特性的实验研究[J]. 微细加工技术, 2008(2): 33-36. Sun Baoyu. Experimental research on dynamic charate- ristic of flexible micrro-displacement mechanism based on piezoelectric actuator[J]. Micro Fabrication Tech- nology, 2008(2): 33-36.
[4] 杜习波, 陈西平, 张斌, 等. 基于三角原理的压电驱动微位移定位机构的设计与分析[J]. 航空精密制造技术, 2009, 45(6): 10-12. Du Xibo, Chen Xiping, Zhang Bin, et al. Design and analysis of micro-displacement mechanism for motion position with piezo-actuator based on triangle prinple [J]. Aviation Precision Manufacturing Technology, 2009(6): 10-12.
[5] 刘登云, 杨志刚, 程光明, 等. 压电叠堆泵微位移放大机构的试验研究[J]. 机械与电子, 2007(3): 75-77. Liu Dengyun, Yang Zhigang, Cheng Guangming, et al. Study on a micro- displacement magnifying mechanism used on piezo-stack pump[J]. Machinery & Electronics, 2007, 3: 75-77.
[6] Li Wanquan, Gao Changyin. Design and modeling of micro-displacement amplifying mechanism using revolute joints and flexible hinges[C]. International Conference on Intelligent Computation Technology and Automation, 2010: 1147-1150.
[7] Sebastian Polit, Dong Jingyan. Development of a high- bandwidth xy nanopositioning stage for high-rate micro-nanomanufacturing[J]. IEEE/ASME Transac- tions on Mechatronics, 2011, 16(4): 724-733.
[8] Xu Qingsong, Li Yangmin, Xi Ning. Design, fabrica- tion, and visual servo control of an xy parallel micro- manipulator with piezo-actuation[J]. IEEE Transactions on Automation Science and Engineering, 2009, 6(4): 710-719 .
[9] 徐志科, 鄢珂, 金龙. 一种正交型压电位移放大机构的研究[J]. 压电与声光, 2009, 31(2): 207-212. Xu Zhike, Yan Ke, Jin Long. Research of orthoconal micro-displacement amplifier with piezoelectric actuator [J]. Piezo electectrics & Acoustooptics, 2009, 31(2): 207-212.
[10] Tao Shuai. Theoretical and test study on piezoelectric actuator based on micro-vibration isolation plate[J]. Master paper, OEC, 2008.
[11] 杜平安, 甘娥忠, 于压婷. 有限元-原理、建模及应用[M]. 北京: 国防工业出版社, 2011.
[12] Kemao Q. Two-dimensional windowed Fourier trans- form for fringe pattern analysis: principles, applica- tions and implementations[J]. Optics and Lasers in Engineering, 2007(45): 304-317.
[13] 史红健, 朱飞鹏, 何小元. 动态投影栅线的加窗傅里叶分析方法[J]. 东南大学学报（自然科学版）, 2010, 40(2): 409-413. Shi Hongjian, Zhu Feipeng, He Xiaoyuan. Windowed Fourier analysis for dynamic fringe projection[J]. Journal of Southeast University (Natural Science Edition), 2010, 40(2): 409-413.
[14] Duan Cunli, Zhang Sujuan, He Xiaofeng. Research of three-dimensional surface detection method based on grating projection[C]. International Conference on Electronics and Optoelectronics (ICEOE 2011), 2011, 2: 335-338.