Abstract：There is tight electromagnetic and mechanical coupling among 6-degree of freedom (DOF) motions of Halbach magnetic levitation planar motor. For the decoupling control of the planar motor, firstly this paper presents the structure and working principle of the planar motor, analyzes the characteristics of the Halbach linear motor actuator, and proposes the electromagnetic force equations of the actuators. Then after presenting the decoupled kinetics models based on the modal forces, the current allocation methods of the modal forces and the current-controlled strategies of vertical and horizontal motions are proposed. At last the servo controllers for the vertical motions are designed and corresponding simulation are done after the feasibility analysis about the current-controlled method. The current-controlled method successfully decouples the 6-DOF motion control equations and all the motion control equations are simple 2nd order linear system, so it lays a theoretical basis for planar motor control.
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2010, Vol. 25 
