微纳尺度电气击穿特性和放电规律研究综述

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摘要微纳尺度电气击穿特性和放电规律是当前国内外学者的研究热点。本文回顾了近70年来国内外学者在该领域的主要研究工作和成果,重点从研究手段、放电规律以及物理机制等方面对不同物理尺度介电系统（宏观尺度电极/微米间隙、微米尺度电极/微米亚微米间隙、纳米尺度电极/纳米亚纳米间隙）的放电击穿特性进行了总结,阐述了电极间隙、气压、电极材料和电极形状等因素的影响机制以及不同物理尺度介电系统的放电规律。通过对微纳尺度电气击穿特性和放电规律的概括和分析,发现当前存在的主要问题并指出下一步的研究方向,对丰富和完善微纳尺度放电击穿理论具有重要参考意义。

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	成永红
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关键词 ：微纳尺度, 电气击穿, 放电规律, Paschen曲线, Townsend雪崩击穿, 场致发射

Abstract：The research on breakdown characteristics and discharge behaviors is gaining attention nowadays. In this paper, the research progress and achievement on this field for nearly 70 years have been reviewed, emphasizing on the experimental technologies, discharge behaviors and physical mechanisms of dielectric systems at various dimensions (the macroscale electrodes with microscale gaps, the microscale electrodes with micro- and sub-microscale gaps and the nanoscale electrodes with nano- and sub-nanoscale gaps). The influences of gap separations, gas pressure, electrode material, electrode shape on breakdown characteristics were summarized. Besides, the discharge behaviors of various dielectric systems were discussed. As a consequence, the review of breakdown characteristics and discharge behaviors at the micro & nano scale is beneficial to recognizing the critical problems and making suggestions for the future research, which could be of great importance to the electrical breakdown theory at the micro & nano scale.

Key words： Micro & nano scale electrical breakdown discharge behaviors Paschen’s curve Townsend avalanche breakdown field emission

收稿日期: 2016-03-11 出版日期: 2017-02-08

PACS:

O461

基金资助:自然科学基金创新研究群体基金（51221005）,中国博士后科学基金（2015M572559）和强脉冲辐射环境模拟与效应国家重点实验室专项经费（SKLIPR.1512）资助项目

作者简介: 成永红男,1965年生,博士,教授,研究方向为极端条件下电介质材料介电性能与放电击穿特性。E-mail: cyh@xjtu.edu.cn（通信作者）;孟国栋男,1985年生,博士,研究方向为微纳尺度介质绝缘系统击穿特性及可靠性评估。E-mail: gdmengxjtu@xjtu.edu.cn

引用本文:

成永红, 孟国栋, 董承业. 微纳尺度电气击穿特性和放电规律研究综述[J]. 电工技术学报, 2017, 32(2): 13-23. Cheng Yonghong, Meng Guodong, Dong Chengye. Review on the Breakdown Characteristics and Discharge Behaviors at the Micro & Nano Scale. Transactions of China Electrotechnical Society, 2017, 32(2): 13-23.

链接本文:

https://dgjsxb.ces-transaction.com/CN/Y2017/V32/I2/13

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