一种大力矩大位移微纳压电致动器的瞬态响应

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摘要基于三角放大原理,利用压电叠堆设计并制造了一种具有高精度大力矩、大位移的致动器,并对其动静态特性进行测试分析。文中还采用Ansys、Matlab软件以及动态投影栅线法,从理论和实测两个方面对该致动器在加载电压和撤除电压时的瞬态响应特性进行了分析和测试,理论分析和实测结果吻合度较高。该压电致动器在通入激励电压时,响应速度快,电压-位移的线性度好;在撤除激励电压时,响应特性过程平稳。为该致动器广泛运用于微纳控制系统中,成为微纳系统中可靠、快速的大位移大力矩驱动部件的应用前景提供了依据。

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	靳宏
	胡敏强
	徐志科
	潘非非

关键词 ：压电叠堆, 位移放大, 致动器, 瞬态特性

Abstract：According to the principle of triangulation amplification and the application method of piezoelectric stack, this paper designs and makes out a kind of actuator, having high precision, high torque and large displacement. In this paper, the actuator’s static and dynamic characteristics are analyzed. The ANSYS, Matlab software and dynamic fringe projection method are used to analyze and test the actuator’s transient response characteristic from theory and actual measurement, when apply and remove the voltage. The real test result coincides with the theory analysis. When the voltage is applied, the piezoelectric actuator owns quick response speed and high voltage-displacement linearity. When the voltage is removed, the piezoelectric actuator owns smooth and steady response characteristic. It provides a basis for the actuator’s widely application, and its application prospect as a reliable and fast large displacement and high torque component in micro control system.

Key words： Piezoelectric stack displacement amplification actuator transient response character- ristic

收稿日期: 2014-08-20 出版日期: 2015-04-14

PACS:

TM35

基金资助:国家自然科学基金资助项目（51177014,51207021）

作者简介: 靳宏女,1973年生,博士研究生,讲师,研究方向为微特电机及电气工程。胡敏强男,1961年生,教授,博士生导师,研究方向为微特电机及其控制,海洋能发电新技术研究。

引用本文:

靳宏,胡敏强,徐志科,潘非非. 一种大力矩大位移微纳压电致动器的瞬态响应[J]. 电工技术学报, 2015, 30(2): 128-133. Jin Hong,Hu Minqiang,Xu Zhike,Pan Feifei. Transient Response Characteristic of High Torque and Large Displacement Micro-/Nano Piezoelectric Actuator. Transactions of China Electrotechnical Society, 2015, 30(2): 128-133.

链接本文:

http://dgjsxb.ces-transaction.com/CN/Y2015/V30/I2/128

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