放电参数变化对电感耦合等离子闭式等离子体空间分布特性研究

doi:10.19595/j.cnki.1000-6753.tces.210022

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Abstract In the application of inductive coupled plasma(ICP), such as the coil configuration, power supply parameters, pressure and other external conditions are different, it is difficult to get the mechanism of multiple influences on the ICP parameter distribution, This paper combine the simulation and experiment methods, by the establishment of the inductive coil electromagnetic finite element model, analyzing the radio frequency electromagnetic field under different coil configuration in the spatial distribution within the plasma, then we study the influence of discharge parameters (coil configuration, power rate) on the plasma distribution and E-H model dynamic process. By analyzing its discharge parameters to provides a theoretical basis for the miniaturization engineering application of plasma source.The results of experiment and simulation show that: ①Under different coil turns and different power rates, the variation of electromagnetic field intensity has a great influence on the plasma power absorption and power coupling. ②When pressure the working gas Ar is between 0-20Pa, the electron density of ICP is axismetrically distributed, with the increase of the discharge power and gas pressure, the absorbed power and ionization degree of the plasma also increased. The distribution of electron density in the axial and radial directions increases gradually and then decreases rapidly near the wall of the chamber.

Key words： Inductively coupled plasma radio frequency power discharge coil parameter spatial distribution

Received: 10 January 2021

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TM31

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	Lin Mao
	Xu Haojun
	Wei Xiaolong
	Han Xinmin
	Wu Songyao

Cite this article:

Lin Mao,Xu Haojun,Wei Xiaolong等. Study on Spatial Distribution of Inductive Coupled Plasma Closed Plasma with Discharge Parameter Variation[J]. Transactions of China Electrotechnical Society, 2022, 37(5): 1294-1304.

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https://dgjsxb.ces-transaction.com/EN/10.19595/j.cnki.1000-6753.tces.210022 OR https://dgjsxb.ces-transaction.com/EN/Y2022/V37/I5/1294

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