基于直流辉光放电等离子体的气体压力传感器

doi:10.19595/j.cnki.1000-6753.tces.201611

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Abstract A type of pressure measuring method based on direct current glow discharge plasma was investigated and a plasma pressure sensor was designed in this paper. The static and dynamic calibrations between the discharge maintaining voltage and air pressure were experimentally tested and analyzed. The static calibration results showed that a spacing of 50μm is suitable for the pressure range from 0.4 to 2.0 atm. A spacing of 220μm is appropriate for the pressure range from 0.5 to 5.0 atm when the currents are selected between 3.0~5.0mA. Additionally, the dynamic calibration experiment was carried out on the shock tube. The results showed that the rise time of the plasma pressure sensor is 1μs, which is the same as the Endevco piezo-resistance transducer. By calculating the dynamic transfer function, the natural frequency of the plasma pressure sensor including its power supply and electronic circuit system is 146.6kHz, which has great potential for acquiring high-frequency flow information in the harsh high temperature and ultra-high-speed flow environment of the aircraft and ramjet engines.

Key words： Glow discharge plasma pressure sensor response characteristic

Received: 08 December 2020

PACS:	V231.3
	TM213

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	Li Fan
	Luo Haiyun
	Du Juan
	Nie Chaoqun

Cite this article:

Li Fan,Luo Haiyun,Du Juan等. Pressure Sensor Based on Direct Current Discharge Plasma[J]. Transactions of China Electrotechnical Society, 2021, 36(15): 3163-3171.

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https://dgjsxb.ces-transaction.com/EN/10.19595/j.cnki.1000-6753.tces.201611 OR https://dgjsxb.ces-transaction.com/EN/Y2021/V36/I15/3163

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