伪火花放电的物理机制与应用综述

doi:10.19595/j.cnki.1000-6753.tces.200262

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Abstract Pseudospark discharge is a special type of low-pressure gas discharge, which works at the left hand of Paschen's curve, ignites from the hollow cathode, and has a homogeneous discharge channel. It is widely used in the fields of pulsed power technology and plasma driving. This paper reviews the researches on physical mechanisms and typical applications of pseudospark discharge in recent years. Firstly, mechanisms and characteristics of sub-phases of pseudospark discharge are analyzed, which are predischarge, hollow cathode discharge, superdense glow discharge, and vacuum arc discharge; secondly, remained problems in pseudospark discharge are analyzed, such as current quenching and impedance fluctuations; thirdly, typical applications of pseudospark discharge are introduced, including pseudospark switch, electron beam sources, extreme ultraviolet light sources, etc., with emphasis on the key parameters and technical characteristics of these devices. Finally, the future research topics are discussed.

Key words： Pseudospark discharge physical mechanisms pseudospark switch electron beam source extreme ultraviolet light source

Received: 14 March 2020

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TM89

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	Yan Jiaqi
	Shen Saikang
	Sun Guoxiang
	Ding Weidong

Cite this article:

Yan Jiaqi,Shen Saikang,Sun Guoxiang等. Review on Physical Mechanisms and Applications of Pseudospark Discharge[J]. Transactions of China Electrotechnical Society, 2021, 36(11): 2408-2423.

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https://dgjsxb.ces-transaction.com/EN/10.19595/j.cnki.1000-6753.tces.200262 OR https://dgjsxb.ces-transaction.com/EN/Y2021/V36/I11/2408

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