微纳尺度电气击穿特性和放电规律研究综述

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Abstract The research on breakdown characteristics and discharge behaviors is gaining attention nowadays. In this paper, the research progress and achievement on this field for nearly 70 years have been reviewed, emphasizing on the experimental technologies, discharge behaviors and physical mechanisms of dielectric systems at various dimensions (the macroscale electrodes with microscale gaps, the microscale electrodes with micro- and sub-microscale gaps and the nanoscale electrodes with nano- and sub-nanoscale gaps). The influences of gap separations, gas pressure, electrode material, electrode shape on breakdown characteristics were summarized. Besides, the discharge behaviors of various dielectric systems were discussed. As a consequence, the review of breakdown characteristics and discharge behaviors at the micro & nano scale is beneficial to recognizing the critical problems and making suggestions for the future research, which could be of great importance to the electrical breakdown theory at the micro & nano scale.

Key words： Micro & nano scale electrical breakdown discharge behaviors Paschen’s curve Townsend avalanche breakdown field emission

Received: 11 March 2016 Published: 08 February 2017

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O461

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	Cheng Yonghong
	Meng Guodong
	Dong Chengye

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Cheng Yonghong,Meng Guodong,Dong Chengye. Review on the Breakdown Characteristics and Discharge Behaviors at the Micro & Nano Scale[J]. Transactions of China Electrotechnical Society, 2017, 32(2): 13-23.

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https://dgjsxb.ces-transaction.com/EN/ OR https://dgjsxb.ces-transaction.com/EN/Y2017/V32/I2/13

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