低温等离子体处理SF<sub>6</sub>废气综述

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Abstract The low temperature plasma technology for waste gas treatment attracts more and more attention. It becomes an important tendency in future’s environmental protection industry. Due to the physical and chemical properties, the treatment of the strong greenhouse gas SF₆ by plasma is faced with more challenges. However, the related researches have rarely been reviewed so far. This paper describes the reaction mechanism as well as three evaluation indexes of plasma treatment of SF₆. According to three main plasma treatment methods including radio frequency, microwave and dielectric barrier discharge, the influences of various factors on the destruction and removal efficiency, energy yield and the final byproducts were then comprehensively overviewed. Moreover, the further issues and the future research directions were also presented. Finally, the feasibility of its industrialization was analyzed.

Key words： Low temperature plasma, SF6, destruction and removal efficiency, harmlessness

Received: 29 May 2016 Published: 03 January 2017

PACS:

O539

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	Articles by authors
	Zhang Xiaoxing
	Xiao Hanyan
	Huang Yangjue

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Zhang Xiaoxing,Xiao Hanyan,Huang Yangjue. A Review of Degradation of SF₆ Waste by Low Temperature Plasma[J]. Transactions of China Electrotechnical Society, 2016, 31(24): 16-24.

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https://dgjsxb.ces-transaction.com/EN/ OR https://dgjsxb.ces-transaction.com/EN/Y2016/V31/I24/16

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