基于前馈控制的等离子体电源恒流控制策略

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Abstract According to the control demands of plasma load, a constant current source control strategy for DC-DC converter to reduce the influence of load disturbance on precise control of current source is proposed, which is based on output voltage feedforward. Firstly, with the open loop transfer matrix of constant current source, the influence mechanism of output admittance on the load disturbance is discussed. Then, the output voltage feedforward based on plasma load equivalent circuit model and the small signal model of converter is introduced to the current loop. The output voltage feedforward compensation function is introduced to reduce the output admittance, and the influence on feedforward functions of plasma equivalent load model parameters is analyzed. Comparisons between the control with and without voltage feedforward compensation are presented. The simulation and experimental results show that, the proposed control strategy not only effectively restrains the influence of load disturbance on constant current source, but also improves the system dynamic response, and has a good effect in improving the film quality.

Key words： Feedforward control constant current source plasma load output admittance

Received: 20 December 2013 Published: 05 November 2014

PACS:	O539
	TM46

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	Articles by authors
	Chen Guitao
	Liu Chunqiang
	Sun Qiang
	Zhong Yanru
	Yin Zhonggang

Cite this article:

Chen Guitao,Liu Chunqiang,Sun Qiang等. A Current Control Strategy Based on Feedforward Control for Plasma[J]. Transactions of China Electrotechnical Society, 2014, 29(8): 187-195.

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http://dgjsxb.ces-transaction.com/EN/ OR http://dgjsxb.ces-transaction.com/EN/Y2014/V29/I8/187

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