动磁式磁悬浮永磁直线同步电机悬浮子系统H<sub>2</sub>/H<sub>∞</sub>混合鲁棒控制策略

doi:10.19595/j.cnki.1000-6753.tces.241251

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Abstract

With the continuous development of science and technology, CNC machine tools have become essential to IC manufacturing, playing a critical role in intelligent manufacturing. Magnetic suspension linear motor (MSLM) solves the friction problem of permanent magnet linear synchronous motor (PMLSM) and realizes the precision control of the feed system of CNC machine tools, which is one of the best choices for the ultra-precision linear positioning motion in the new generation of lithography machines and other high-end equipment. However, the electromagnetic characteristics of MLSM are complex, and the system is inherently coupled and unstable. Establishing a mathematical model of the magnetic levitation system to decouple the system is challenging. This paper studies a hybrid H₂/H_∞ robust control strategy, which utilizes the H₂ paradigm to suppress the internal disturbances of the system.
Firstly, the structure and working principle of the motor are analyzed, and the mathematical model of the moving magnet type magnetic levitation permanent magnet linear synchronous motor (MMT-MLPMLSM) in the synchronous rotating coordinate system is deduced. Then, the closed-loop control system of the MMT-MLPMLSM is established. The developed mathematical model shows that the levitation system has strong nonlinear characteristics. As a positioning actuator, the magnetic levitation system needs to levitate stably at the equilibrium position. Accordingly, the Taylor expansion of the magnetic levitation force near the equilibrium point is helpful for the design of the controller. Finally, the state space equations of the motor are obtained based on the mathematical model.
Secondly, the H_∞ robust controller and H₂/H_∞ hybrid robust controller are designed. The stability of the designed controller is verified using the Bird's plot and the zero-pole distribution graph. The effect of the weighting matrix on the dynamics and robustness of the system is investigated, guiding the parameter selection of the weighting matrix.
Finally, an experimental platform for the MMT-MLPMLSM suspension system based on STM32F407 is established. The simulation and experimental results verify the proposed hybrid H₂/H_∞ robust control strategy under steady state and dynamic conditions.
Compared with the H_∞ robust controller, the H₂/H_∞ hybrid robust controller designed in this paper can improve the dynamic performance of the system by 34.4% regarding startup performance and the robustness of the system by 16.7% regarding disturbance immunity performance. Good control effects can be achieved under low-speed, medium-speed, and high-speed traction conditions, and the motor's secondary fluctuations can be suppressed efficiently.

Key words： Moving magnet type magnetic levitation linear motor mathematical model of magnetic levitation system weighting matrix H₂/H_∞ hybrid robust control

Received: 14 July 2024

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TM133

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	Yan Shuntian
	Tan Qiang
	Tian Bing
	Ma Runcheng
	Li Jing

Cite this article:

Yan Shuntian,Tan Qiang,Tian Bing等. Hybrid H₂/H_∞ Robust Control Strategy for the Levitation Subsystem of Moving Magnet Type Magnetic Levitation Permanent Magnet Linear Synchronous Motor[J]. Transactions of China Electrotechnical Society, 2025, 40(17): 5422-5433.

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https://dgjsxb.ces-transaction.com/EN/10.19595/j.cnki.1000-6753.tces.241251 OR https://dgjsxb.ces-transaction.com/EN/Y2025/V40/I17/5422

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