等离子体复合薄膜沉积抑制金属微粒启举

doi:10.19595/j.cnki.1000-6753.tces.L80830

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Abstract

Metal particles pollution in gas insulation transmission line (GIL) and gas insulated switchgear (GIS) is one of the main factors affecting the insulation performance of the equipment. The electrode surface coating can improve the lifting voltage of metal particles under DC stress to a certain extent. The SiO₂-TiO₂ composite film was deposited on the surface of Cu by AC powered atmospheric pressure plasma jet. A compact composite film consisting of TiO₂ film with a thickness of about 2μm and SiO₂ film of 3.5μm was obtained. At 1kHz, the dielectric constant of TiO₂ and SiO₂ films is about 24 and 4, respectively. In addition, an experimental platform for metal particles motion test was established to compare the influence of the deposition of film on the initiation of metal particles. Besides, the electric field distortion between the high-voltage electrode and the metal particles before and after deposition were simulated. The result shows that the lifting voltage of metal particles can be improved about 20% by depositing thin films on the electrode surface. The initial lifting time of metal particles is delayed. The maximum field strength between metal particles and electrode decreases from 1.98×10⁸V/m to 1.82×10⁸V/m after deposition of composite thin film. Therefore, the deposition of thin films on the electrode surface by plasma enhanced chemical vapor deposition can improve the initiation voltage and reduce the activity of metal particles. This worked provides a new solution for engineering application.

Key words： Atmospheric pressure plasma jet DC gas insulation transmission line film deposition electrode surface coating metal particle lifting

Received: 13 June 2018 Published: 30 October 2018

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TM85

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	Cheng Xian
	Xu Hui
	Wang Ruixue
	Gao Yuan
	Zhang Cheng
	Shao Tao

Cite this article:

Cheng Xian,Xu Hui,Wang Ruixue等. Composite Thin Film Deposited by Plasma to Inhibit the Lifting of Metal Particles[J]. Transactions of China Electrotechnical Society, 2018, 33(20): 4672-4681.

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https://dgjsxb.ces-transaction.com/EN/10.19595/j.cnki.1000-6753.tces.L80830 OR https://dgjsxb.ces-transaction.com/EN/Y2018/V33/I20/4672

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